In-process surface roughness measurement of bulk metallic glass using an adaptive optics system for aberration correction

Fuh, Yiin Kuen; Fan, Jia Ren; Huang, Chung Yu; Jang, Shian Ching

doi:10.1016/j.measurement.2013.07.034

Cited by 8 publications

(5 citation statements)

References 23 publications

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“…In the measurement of surface roughness using optical methods, techniques based on the phenomenon of light scattering on the measured surface are also used [16]. Another interesting method of analyzing the surface irregularities of products is the application of signal decomposition using a wavelet transform for this purpose [17][18][19][20].…”

Section: Introductionmentioning

confidence: 99%

The Study of the Influence of the Tracing Speed on the Result of Surface Roughness Measurement Using the Tactile Method

Stępień,

Makieła,

Świderski

2023

Applied Sciences

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This work concerns the problem of measuring surface roughness using the tactile method. The result of such a measurement is influenced by many factors, for example, the applied measurement parameters or changes in ambient conditions, e.g., temperature. The authors attempted to determine the influence of the tracing speed of the result of the profilometer tip on the roughness measurement of surfaces characterized by different types of irregularities. In the experiment, samples manufactured using various machining techniques were measured. Eleven selected roughness parameters were observed, including the most well-known ones, such as Ra, Rz, or Rt. The results obtained by the authors allowed them to determine which of the analyzed parameters are the most sensitive to changes in the tracing speed of the measuring tip, which is of great importance in the aspect of surface roughness measurements in industrial conditions. Owing to the obtained results, it is possible to determine in which cases it is possible to increase the speed of tip travel without reducing the reliability of the obtained results of surface roughness measurement.

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Section: Introductionmentioning

confidence: 99%

The Study of the Influence of the Tracing Speed on the Result of Surface Roughness Measurement Using the Tactile Method

Stępień,

Makieła,

Świderski

2023

Applied Sciences

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“…Fuh et al [19] developed a system for in-process measurement of surface roughness by combining an optical probe and adaptive optics. Speckle metrology [20] has been verified and deployed to measure the surface roughness of bulk metallic glasses through a laser-scattering method with adaptive optics, and can be integrated into a manufacturing process for in-situ measurement [21]. Recently, Sugino et al [22] proposed a patterned area illumination method to measure the specular reflection of the polished metal surfaces and study the correlation between the surface topography and glossiness values.…”

Section: Introductionmentioning

confidence: 99%

Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Fang

Tjahjowidodo

2020

Metals

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Mirror-finished surface products have a wide range of applications in different engineering industries, such as power generation, aerospace, semiconductors and optics. The surface topography of mirror-finished products is typically measured in a metrology laboratory, which is typically time consuming and cannot be integrated into the manufacturing process. To allow for in-situ product quality assurance and automatic tool change for manufacturing processes, a more accurate and responsive surface-measurement method is needed. For highly polished surfaces, a sub-micron surface fluctuation makes it possible to use light-scattering effects and image processing for surface texture analysis. A non-contact surface inspection system using a fringe-patterned illumination method is proposed in this paper. A predesigned pattern was projected onto the target surface, and its reflected image was captured by a camera. It was found that the surface parameters Sa and Sq, which are widely used to evaluate surface quality, are significantly correlated with luminous-intensity distribution. Another parameter, Str, which quantifies the uniformity of surface-texture directions due to polishing or grinding marks, was traditionally quantified after a complete-surface topographic measurement. In this research, a new approach is proposed to determine surface isotropy through a luminance-intensity distribution analysis. By rotating the test coupon, the variation of specular reflection showed correlation with the significance of surface-texture direction. The experimental results demonstrate that mirror-finished surfaces with a large deviation in luminance intensity across the pattern possess low Str values, which indicates low uniformity in surface texture.

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“…Based on the above literature review and analysis, the motivation of this presented work is to develop an optical surface texture measurement system able to perform both line and area scans for challenging surfaces with complex geometry and irregular surface patterns. Unlike a laboratory solution, the proposed system has the potential to be utilized for in situ measurement [23,24].…”

Section: Introductionmentioning

confidence: 99%

Surface Texture Measurement on Complex Geometry Using Dual-Scan Positioning Strategy

Fang

Chen

2020

Applied Sciences

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In this paper, a surface measurement method based on dual-scan positioning strategy is presented to address the challenges of irregular surface patterns and complex geometries. A confocal sensor with an internal scanning mechanism was used in this study. By synchronizing the local scan, enabled by the internal actuator in the confocal sensor, and the global scans, enabled by external positioners, the developed system was able to perform noncontact line scan and area scan. Thus, this system was able to measure both surface roughness and surface uniformity. Unlike laboratory surface measurement equipment, the proposed system is reconfigurable for in situ measurement and able to scan free-form surfaces with a proper stand-off distance and approaching angle. For long-travel line scan, which is needed for rough surfaces, a surface form tracing algorithm was developed to ensure that the data were always captured within the sensing range of the confocal sensor. It was experimentally verified that in a scanning length of 100 mm, where the surface fluctuation in vertical direction is around 10 mm, the system was able to perform accurate surface measurement. For area scan, XY coordinates provided by the lateral positioning system and the Z coordinate captured by the confocal sensor were plotted into one coordinate system for 3D reconstruction. A coherence scanning interferometer and a confocal microscope were employed as the reference measurement systems to verify the performance of the proposed system in a scanning area of 1 mm by 1 mm. Experimental data showed that the proposed system was able to achieve comparable accuracy with laboratory systems. The measurement deviation was within 0.1 µm. Because line scan mechanisms are widely used in sensor design, the presented work can be generalized to expand the applications of line scan sensors.

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In-process surface roughness measurement of bulk metallic glass using an adaptive optics system for aberration correction

Cited by 8 publications

References 23 publications

The Study of the Influence of the Tracing Speed on the Result of Surface Roughness Measurement Using the Tactile Method

The Study of the Influence of the Tracing Speed on the Result of Surface Roughness Measurement Using the Tactile Method

Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Surface Texture Measurement on Complex Geometry Using Dual-Scan Positioning Strategy

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