Abstract:Laser-induced periodic surface structure (LIPSS) in nanometer scale formed by femtosecond (fs) laser pulses depends strongly on laser parameters such as fluence and superimposed pulse number, as well as the surface condition of target materials. Process control based on in-process monitoring is one of the solutions to form the nanostructure stably and homogeneously. However, it is difficult to monitor the nanostructure in the process, because it is much smaller than the light wavelength. This paper reports on … Show more
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