In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

Krishnamoorthy, Uma; Olsson, Roy H.; Bogart, Gregory R.; Baker, Michael; Carr, Dustin W.; Swiler, Thomas P.; Clews, Peggy J.

doi:10.1016/j.sna.2008.03.017

Cited by 147 publications

(56 citation statements)

References 7 publications

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“…Previous work on the optimization of capacitive [4,5] and optical MEMS accelerometers [6] have resulted in devices that offer sub-μg resolution, making them potentially attractive for the above applications. Recent work from our group previously reported on a prototype resonant MEMS accelerometer [7] demonstrating the potential of achieving sub-μg resolution, with reduced 1/f noise limited corner frequency and much smaller volumes comparing to capacitive designs of similar resolution.…”

Section: Introductionmentioning

confidence: 99%

A high-resolution resonant MEMS accelerometer

Zou

Seshia

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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This paper reports on a vacuum packaged resonant MEMS accelerometer that demonstrates some of the highest sensitivities reported to-date and a ~7x scale factor enhancement relative to a recently reported prototype, benefiting from a larger proof mass and improved leverage amplification factor. The device describes a scale factor of 960 Hz/m/s 2 over a dynamic range of approximately +/-0.5 m/s 2 . The experimentally measured intrinsic noise limited resolution of the accelerometer is less than 150 ng/√Hz in the frequency range from < 1 Hz up to 50 Hz.

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Section: Introductionmentioning

confidence: 99%

A high-resolution resonant MEMS accelerometer

Zou

Seshia

2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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“…Traditional EW coupling accelerometers are in-plane nano-grating accelerometers. However, their fabrication is difficult because of SW gratings with high aspect ratio and near-field coupling region between SW gratings [2]. Recently, out-of-plane MOEMS accelerometers based on evanescent wave coupling using SW gratings have generated considerable interest in the scientific community for their fabrication simplicity.…”

Section: Introductionmentioning

confidence: 99%

Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings

Yao

Feng

Wang

et al. 2014

IEEE Photon. Technol. Lett.

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A novel out-of-plane MOEMS accelerometer based on near-field evanescent wave coupling by means of variable period subwavelength gratings has been proposed. First, the diffraction order number was calculated. Then, structure parameters were optimized by finite element analysis to achieve high sensitivity in an ideal vibration mode. Results show that the accelerometer has displacement sensitivity at 2033 nm/G with a measurement range of 0.12 G, corresponding to first diffraction beam optical sensitivity 0.46%/mG. Finally, we designed the fabrication method to form such MOEMS accelerometer and successfully fabricated the uniform and well-designed subwavelength gratings with the period of 1.0 µm by FIB/SEM dual beam system. The subwavelength gratings fabricated are very close to those designed within the experimental error to lay the foundation for the subsequent fabrication. These results provide a theoretical basis for design and fabrication of an out-of-plane MOEMS accelerometer with subwavelength gratings.Index Terms-Evanescent wave coupling, subwavelength gratings, MOEMS accelerometer, FIB/SEM dual beam system.

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“…Among the engineering modalities, linear motion and rotational motion are detected by accelerometers and gyroscopes, respectively [26–30]. Cantilever based accelerometers have attracted tremendous interest during the past decades, and are widely available for motion sensing.…”

Section: Introductionmentioning

confidence: 99%

Sensing Movement: Microsensors for Body Motion Measurement

Zeng

Zhao

2011

Sensors

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Recognition of body posture and motion is an important physiological function that can keep the body in balance. Man-made motion sensors have also been widely applied for a broad array of biomedical applications including diagnosis of balance disorders and evaluation of energy expenditure. This paper reviews the state-of-the-art sensing components utilized for body motion measurement. The anatomy and working principles of a natural body motion sensor, the human vestibular system, are first described. Various man-made inertial sensors are then elaborated based on their distinctive sensing mechanisms. In particular, both the conventional solid-state motion sensors and the emerging non solid-state motion sensors are depicted. With their lower cost and increased intelligence, man-made motion sensors are expected to play an increasingly important role in biomedical systems for basic research as well as clinical diagnostics.

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In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

Cited by 147 publications

References 7 publications

A high-resolution resonant MEMS accelerometer

A high-resolution resonant MEMS accelerometer

Design of Out-of-Plane MOEMS Accelerometer With Subwavelength Gratings

Sensing Movement: Microsensors for Body Motion Measurement

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