In-plane displacement measurement by using circular grating Talbot interferometer

Agarwal, Shilpi; Shakher, Chandra

doi:10.1016/j.optlaseng.2015.06.011

Cited by 20 publications

(5 citation statements)

References 38 publications

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“…Non-contact sensors mainly include optical sensors, capacitive sensors [22,23], magnetoresistive sensors [24][25][26] and inductive sensors [27,28]. Optical sensors are categorized as photoelectric encoders [29][30][31] or grating sensors [32][33][34]. Their advantages are high measurement resolution and accuracy.…”

Section: Of 29mentioning

confidence: 99%

Modelling, Linearity Analysis and Optimization of an Inductive Angular Displacement Sensor Based on Magnetic Focusing in Ships

Wang

et al. 2023

JMSE

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A sensor for measuring the crankshaft angle of the main engine in ships is designed. Compared with the existing crankshaft angle encoder, this design’s advantage is that there is no need to add a gear system at the free end of the crankshaft, reducing machining complexity. The purpose of providing high angle resolution over a wide speed range is achieved. Inductive angular displacement sensors (IADSs) require an eddy current magnetic field as a medium to generate the induced voltage. The induced voltage also requires a complex linearization calculation to obtain a linear relationship between angle and voltage. Therefore, a model of the inductive angular displacement sensor based on magnetic focusing (IADSMF) is proposed. Magnetic focusing is introduced into the IADS to replace the eddy current magnetic field with a focusing magnetic field. The main disadvantage of traditional IADSs, which is that they cannot reduce the eddy current magnetic field, is mitigated. An approximate square−shaped focusing magnetic field (12.4 × 12.4 mm2) is formed using the magnetic field constraint of the magnetic conductor. When the receiving coil undergoes a position change relative to the square−shaped focusing magnetic field, the voltage generated via the receiving coil is measured using the electromagnetic induction principle to achieve angular displacement measurement. A mathematical model of the IADSMF is derived. Induced voltages at different frequencies and rotational speeds are simulated and analyzed via MATLAB. The results show that frequency is the main factor affecting the induced voltage amplitude. The sensitivity of the IADSMF is 0.2023 mV/°. The resolution and measurement of the IADSMF range from 0.06° and 0–360°. Compared with a conventional planar coil−based IADS, the eddy current loss is reduced from 2.1304 to 0.3625 W. Direct linearization of the angular displacement with the induced voltage is achieved through designing a square−shaped focusing field and receiving coil. After optimizing the sensor structure with the optimization algorithm, the linearity error is 0.6012%. Finally, this sensor provides a theoretical basis and research ideas for IADS development in ships and navigation.

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Section: Of 29mentioning

confidence: 99%

Modelling, Linearity Analysis and Optimization of an Inductive Angular Displacement Sensor Based on Magnetic Focusing in Ships

Wang

et al. 2023

JMSE

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“…For linear displacement measurement, in 2014, P. Rodriguez-Montero et al presented a device for measuring displacement based on self-imaging and non-steady photo-electromotive force effects, demonstrating an estimated resolution better than 10 µm within a dynamic range of 1.5 mm [20]. In 2015, S. Agarwal et al reported an in-plane displacement measurement by using a circular grating Talbot interferometer [21]. By analyzing the shift of self-imaging interferometric fringe patterns, a resolution at the micrometer level was reported.…”

Section: Introductionmentioning

confidence: 99%

Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Zhang,

Yang,

Niu

et al. 2024

Sensors

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In this paper, an ultracompact combined sensor for displacement and angle-synchronous measurement is proposed based on the self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission, respectively, within one single structure in the meantime. The optically transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4 nm for linear displacement measurement and a maximum sensitivity of 0.26 mV/arcsec within a range of ±1° for angle measurement. Benefiting from a simple common-path structure without using optical components, including reflectors and polarizers, the sensor shows ultra-high compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in fields such as integrated mechanical positioning and semiconductor fabrication.

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“…For linear displacement measurement, in 2014, P. Rodriguez-Montero et al present a device for measuring displacement based on the self-imaging and the nonsteady photo-electromotive force effects, demonstrating an estimated resolution better than 10μm within a dynamic range of 1.5mm [20]. In 2015, S. Agarwal et al reported an in-plane displacement measurement by using a circular grating Talbot interferometer [21]. By analyzing the shift of self-imaging interferometric fringe patterns, a resolution at micrometer level was reported.…”

Section: Introductionmentioning

confidence: 99%

Combined Displacement and Angle Sensor with Ultrahigh Compactness Based on Self-imaging Effect of Optical Microgratings

Zhang,

Yang,

Niu

et al. 2023

Preprint

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In this paper, an ultracompact combined sensor for displacement and angle synchronous measurement is proposed based on self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission respectively within one single structure in meantime. The optical transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that, the optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4nm for linear displacement measurement, and a sensitivity of 0.26mV/arcsec within a range of ±1° for angle measurement. Benefitting from a simple common-path structure without using optical components including reflectors and polarizers, the sensor shows an ultrahigh compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in the fields such as integrated mechanical positioning and semiconductor fabrication.

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In-plane displacement measurement by using circular grating Talbot interferometer

Cited by 20 publications

References 38 publications

Modelling, Linearity Analysis and Optimization of an Inductive Angular Displacement Sensor Based on Magnetic Focusing in Ships

Modelling, Linearity Analysis and Optimization of an Inductive Angular Displacement Sensor Based on Magnetic Focusing in Ships

Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings

Combined Displacement and Angle Sensor with Ultrahigh Compactness Based on Self-imaging Effect of Optical Microgratings

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