2000
DOI: 10.1088/0957-4484/11/1/305
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In-plane deformation measurement using the atomic force microscope moiré method

Abstract: In this paper, a new scanning moiré method is developed to measure the in-plane deformation of mica using an atomic force microscope (AFM). Moiré patterns are formed by the scanning line of the CRT in the AFM system, and the atomic lattice of the mica or high-orientated pyrolytic graphite (HOPG). The measurement principle and the techniques employed for grating preparation are described in detail. This new method is used to measure the residual deformation of a mica plate after irradiation by a Nd-YAG laser, a… Show more

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Cited by 68 publications
(48 citation statements)
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“…Electron Moiré method, developed by Kishimoto et al, is a new full-field technique to measure deformations in a microscopic area, which utilizes the changes of Moiré interference fringes due to deformation (Ref [13][14][15]. The Moiré fringes are generated by the interferences of the model grid on the measured surface and the master grid of electron beams in Scanning Electron Microscope (SEM).…”
Section: Introductionmentioning
confidence: 99%
“…Electron Moiré method, developed by Kishimoto et al, is a new full-field technique to measure deformations in a microscopic area, which utilizes the changes of Moiré interference fringes due to deformation (Ref [13][14][15]. The Moiré fringes are generated by the interferences of the model grid on the measured surface and the master grid of electron beams in Scanning Electron Microscope (SEM).…”
Section: Introductionmentioning
confidence: 99%
“…The Moiré methods can also be subdivided into the geometric Moiré method [4], Moiré interferometry [5], the digital Moiré [6] or overlapping Moiré method, the laser scanning Moiré method (also called as laser scanning confocal microscopy Moiré) [7,8], the electron scanning Moiré method (also called as electron beam Moiré or scanning electron microscope Moiré) [9,10], the atomic force microscope Moiré method [11], the sampling Moiré method [12,13], etc. Among the aforementioned various Moiré methods, the sampling Moiré method adopts the spatial phaseshifting technique, and the other Moiré methods are usually combined with the temporal phaseshifting technique to analyze the Moiré phase for deformation measurement.…”
Section: Introductionmentioning
confidence: 99%
“…The basic principle of the method and an experimental result in symmetric three-point bending are reported. Our method is partly similar to the digital moiré method [24][25][26]. In digital moiré method, the moiré fringe pattern is generated by superposition of a digital (virtual reference) grating onto the specimen grating, and then a low-pass filtering is applied to the image.…”
Section: Introductionmentioning
confidence: 99%