2016
DOI: 10.1016/j.nimb.2015.11.012
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In-air ion beam analysis with high spatial resolution proton microbeam

Abstract: One of the possible ways to maintain the micrometer spatial resolution while performing ion beam analysis in the air is to increase the energy of ions. In order to explore capabilities and limitations of this approach, we have tested a range of proton beam energies (2 -6 MeV) using in-air STIM (Scanning Ion Transmission Microscopy) setup. Measurements of the spatial resolution dependence on proton energy have been compared with SRIM simulation and modelling of proton multiple scattering by different approaches… Show more

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Cited by 2 publications
(2 citation statements)
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“…Effects of ion beam spread, caused by ion Multiple Scattering (MS) in degrader foils, have to be taken into account when ion beam energy degraders are used [ 30 ]. The angular spreads of heavy ions in Al foils could be modeled using Sigmund and Winterborn [ 31 ] model of MS angular distributions and their approximation by Pseudo-Voigt distributions [ 32 , 33 ]. The angular spread of protons and He ions due to MS in aluminum foils could be simulated as well.…”
Section: Methodsmentioning
confidence: 99%
“…Effects of ion beam spread, caused by ion Multiple Scattering (MS) in degrader foils, have to be taken into account when ion beam energy degraders are used [ 30 ]. The angular spreads of heavy ions in Al foils could be modeled using Sigmund and Winterborn [ 31 ] model of MS angular distributions and their approximation by Pseudo-Voigt distributions [ 32 , 33 ]. The angular spread of protons and He ions due to MS in aluminum foils could be simulated as well.…”
Section: Methodsmentioning
confidence: 99%
“…This loss is caused by a baseline drop of the first stage amplifier when the sensor is hit by an ion beam at high intensity. The in-air proton microbeam at Ruđer Bošković Institute [6] was used in order to determine the region with a typical size of O (μm 2 ) and the corresponding signal processing structure which is responsible for the baseline drop of the in-pixel amplifier when hit by ions.…”
Section: Microbeam Testmentioning
confidence: 99%