Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles

Kumagai, Shinya; Tomikawa, Takashi; Ogawa, Shigeo; Yamashita, Ichiro; Uraoka, Yukiharu; Sasaki, Minoru

doi:10.1063/1.4833875

Cited by 5 publications

(3 citation statements)

References 33 publications

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“…In this study, patterning the Ni nanoparticles on the a-Si film can define the positions of grain boundaries in the Si thin film. 39) Therefore, the grain boundaries, which degrade the mechanical characteristics of the Si thin film, can be removed from the torsion bars of the IR resonator.…”

Section: Increasing Residual Tensile Stress In Poly-si Thin Filmmentioning

confidence: 99%

Micromechanical IR thermal detector using torsional oscillation: Improvement of resonator profile for high sensitivity

Jeong

Kumagai

Yamashita

et al. 2015

Jpn. J. Appl. Phys.

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An infrared (IR) thermal detector, which used the torsional oscillation of a micromechanical resonator, was developed to achieve a high sensitivity. The detector has a bimaterial structure consisting of a tense Si film (oscillating body) and a metal film (IR absorber). Owing to the difference in thermal expansion between the two materials, the resonator is bent by light incidence. Because the axis of torsion is bent from the initial flat state, the spring for torsional oscillation hardens and resonant frequency shifts. To enhance bending, an Al film with a large coefficient of thermal expansion was used. In addition, the tension in the polycrystalline Si film was enhanced by metal-induced lateral crystallization using biomineralized Ni nanoparticles. The fabricated detector was flat under initial conditions and showed a bending response to the light incidence and heating. The present IR detector achieved a thermal coefficient of frequency of 1000 ppm/K, which was one order larger than that of the conventional micromechanical IR sensors.

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Section: Increasing Residual Tensile Stress In Poly-si Thin Filmmentioning

confidence: 99%

Micromechanical IR thermal detector using torsional oscillation: Improvement of resonator profile for high sensitivity

Jeong

Kumagai

Yamashita

et al. 2015

Jpn. J. Appl. Phys.

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“…The BNP was proposed for constructing sub-10 nm nano-structures that cannot be achieved by conventional semiconductor nano-fabrication processes. BNP-formed nano-structures have been applied to various devices such as single electron transistors [11], resistance random access memory [12,13], dye-sensitized solar cells [14] and others [15,16]. Cage-shaped proteins, including ferritin and Dps (DNA binding protein from starved cells), now play an important role in the development of nano-electronic devices [17,18].…”

Section: Introductionmentioning

confidence: 99%

Floating gate memory with charge storage dots array formed by Dps protein modified with site-specific binding peptides

et al. 2015

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We report a nanodot (ND) floating gate memory (NFGM) with a high-density ND array formed by a biological nano process. We utilized two kinds of cage-shaped proteins displaying SiO2 binding peptide (minTBP-1) on their outer surfaces: ferritin and Dps, which accommodate cobalt oxide NDs in their cavities. The diameters of the cobalt NDs were regulated by the cavity sizes of the proteins. Because minTBP-1 is strongly adsorbed on the SiO2 surface, high-density cobalt oxide ND arrays were obtained by a simple spin coating process. The densities of cobalt oxide ND arrays based on ferritin and Dps were 6.8 × 10(11) dots cm(-2) and 1.2 × 10(12) dots cm(-2), respectively. After selective protein elimination and embedding in a metal-oxide-semiconductor (MOS) capacitor, the charge capacities of both ND arrays were evaluated by measuring their C-V characteristics. The MOS capacitor embedded with the Dps ND array showed a wider memory window than the device embedded with the ferritin ND array. Finally, we fabricated an NFGM with a high-density ND array based on Dps, and confirmed its competent writing/erasing characteristics and long retention time.

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“…However, this proposed method would be applicable to the collection of microbial cells, if cells can be treated as particles. In addition, this proposed method might be combined with a viscometer using MEMS resonators 28) for the measurement of the mechanical impedance of cell suspension. If the cellular volume can be estimated by determining the viscosity, it is expected that this method can be applied to the physicochemical analysis of microorganisms.…”

mentioning

confidence: 99%

Microchannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave

Matsutani

Takada

2016

Jpn. J. Appl. Phys.

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We demonstrate a microchannel-free collection method at nodes of liquid standing waves by the vertical vibration of a suspension including yeast cells. The pattern formation of the collection of cells using standing waves in a suspension was investigated by varying the frequency and waveform of vibrations. The single-cell isolation of yeast cells was achieved using a microenclosure array set at the nodes. In addition, we succeeded in the microchannel-free collection of yeast cells in a suspension, where patterns were formed by tapping vibration. The proposed technique is very simple and we believe that it will be useful for single-cell analysis and investigation.

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Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles

Abstract: Articles you may be interested inHigh quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping Appl. Phys. Lett.

Cited by 5 publications

References 33 publications

Micromechanical IR thermal detector using torsional oscillation: Improvement of resonator profile for high sensitivity

Micromechanical IR thermal detector using torsional oscillation: Improvement of resonator profile for high sensitivity

Floating gate memory with charge storage dots array formed by Dps protein modified with site-specific binding peptides

Microchannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave

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