2012
DOI: 10.2971/jeos.2012.12049
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Improving the polishing accuracy by determining the variance of the friction coefficient

Abstract: The variation of the friction coefficient in the polishing process is investigated comparing the results of a numerical simulation with polishing experiments. To improve the accuracy of the predicted wear in the simulation a method is presented to measure the friction coefficient in relation to the relative velocity using an offset tool.

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Cited by 11 publications
(2 citation statements)
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“…The third possible mode is mixing or transition mode, which arises in unstable states between the two modes mentioned above. Results of experiments presented in [2] and [4] shows significant drop of the friction coefficient in the relative velocity range called Coulomb interval. In agreement with the previous mentioned modes the drop of friction coefficient is described as the aqua planning effect, characterized by the formation of a liquid film between the glass surface and the polishing pad because of the high rotational speed.…”
Section: Modes Of Polishingmentioning
confidence: 93%
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“…The third possible mode is mixing or transition mode, which arises in unstable states between the two modes mentioned above. Results of experiments presented in [2] and [4] shows significant drop of the friction coefficient in the relative velocity range called Coulomb interval. In agreement with the previous mentioned modes the drop of friction coefficient is described as the aqua planning effect, characterized by the formation of a liquid film between the glass surface and the polishing pad because of the high rotational speed.…”
Section: Modes Of Polishingmentioning
confidence: 93%
“…Polishing is the final and most precise machining operation, during which the surface of the lens can still be handled. [1,2].…”
Section: Polishing Process Overviewmentioning
confidence: 99%