2019
DOI: 10.1016/j.surfcoat.2018.11.023
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Improving the oxygen barrier properties of PET polymer by radio frequency plasma-polymerized SiOxNy thin film

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Cited by 20 publications
(21 citation statements)
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“…In this sub-section, an apparent deposition mechanism is proposed based on the consideration of all previously mentioned gas phase and films characterization results 2). So, even if these radical species (H°, CH3°) were not evidently trapped with POBN, their presence can still be assumed given their high reactivity.…”
Section: Proposition Of a Deposition Mechanismmentioning
confidence: 98%
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“…In this sub-section, an apparent deposition mechanism is proposed based on the consideration of all previously mentioned gas phase and films characterization results 2). So, even if these radical species (H°, CH3°) were not evidently trapped with POBN, their presence can still be assumed given their high reactivity.…”
Section: Proposition Of a Deposition Mechanismmentioning
confidence: 98%
“…The atomic network of amorphous SiOxNy is denser than that of SiO2 due to the partial replacement of O anions by highly coordinated N ones and for this reason such films present better thermal and chemical stability, 2 superior hardness 3 and enhanced anti-corrosion properties. 4 At the same time, a SiOxNy material presents reduced intrinsic mechanical stress, which commonly describes the more rigid Si3N4, avoiding thus the emergence of cracks that can be detrimental to product performance.…”
Section: Introductionmentioning
confidence: 99%
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“…Due to its excellent photoelectric performance, it has been widely used in optical devices, dielectric gate dielectric materials, and optical waveguide materials [118]. The SiN x O y film also has high chemical stability, high resistance to impurity diffusion, and water vapor permeability, which is highly promising for applications in barrier devices such as gas barriers [119]. In addition, the SiN x O y film has a small defect density and is advantageous in applications as a storage medium.…”
Section: Applications Of Sinxoy Filmmentioning
confidence: 99%
“…PET can also be modified by blending or by the addition of oxygen scavengers or coated to improve its barrier properties (. [7][8][9][10][11][12][13][14][15][16] Oxygen barrier as such low as~0.2 cc/cm m À2 atm À1 day À1 can be achieved on PET bottle. However, PET requires accurate drying before being processed and processing temperature very high that seldom is lower than 250 C in injection molding of preforms.…”
Section: Introductionmentioning
confidence: 99%