Improving the Electrical Contact Performance for Amorphous Wire Magnetic Sensor by Employing MEMS Process

Chen, Yulong; Li, Jianhua; Chen, Jianwen; Xu, Lixin

doi:10.3390/mi9060299

Cited by 9 publications

(4 citation statements)

References 20 publications

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“…Thus, the software ADAMS could automatically calculate the mass and moment inertia of the components. Based on the contact collision model [25,26], when the contact occurs between two entities, the ADAMS will also automatically calculate the geometric center of contact intersection. The polishing parameters were pre-defined with the values listed in Table 7.…”

Section: Kinematic Simulation In Adamsmentioning

confidence: 99%

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish

Xiao

Mei

et al. 2020

Micromachines

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In this study, a novel finishing method, entitled clustered magnetorheological finish (CMRF), was proposed to improve surface finish of the silicon nitride ( Si 3 N 4 ) balls with ultra fine precision. The effects of different polishing parameters including rotation speeds, eccentricities and the machining gaps on surface finish of Si 3 N 4 balls were investigated by analyzing the roughness, sphericity and the micro morphology of the machined surface. The experimental results showed that the polishing parameters significantly influenced the surface finish. The best surface finish was obtained by using the polishing parameters: the machining gap of 0.8 mm, the eccentricity of 10 mm and the rotation ratio of 3/4. To further investigate the influence of the polishing parameters on the surface finish, an analytical model was also developed to analyze the kinematics of the ceramic ball during CMRF process. The resulting surface finish, as a function of different polishing parameters employed, was evaluated by analyzing the visualized finishing trace and the distribution of the contact points. The simulative results showed that the distribution and trace of the contact points changed with different polishing parameters, which was in accordance with the results of experiments.

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Section: Kinematic Simulation In Adamsmentioning

confidence: 99%

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish

Xiao

Mei

et al. 2020

Micromachines

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“…The magnetic sensor using this kind of amorphous wire as a sensitive material has a maximum sensitivity of 23 %/Oe in the range of 100 MHz to 300 MHz. Yulong Chen et al presented a novel fabrication method for amorphous alloy wire GMI magnetic sensor based on MEMS technology [17]. In this process, negative SU-8 thick photoresist was proposed as the solder mask due to its excellent properties and the low melting temperature solder paste was used for the electrical connections with the amorphous alloy wire and the electrode pads.…”

Section: Introductionmentioning

confidence: 99%

Highly Integrated MEMS Magnetic Sensor Based on GMI Effect of Amorphous Wire

Chen

2019

Micromachines

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In this paper, a highly integrated amorphous wire Giant magneto-impedance (GMI) magnetic sensor using micro electron mechanical system (MEMS) technology is designed, which is equipped with a signal conditioning circuit and uses a data acquisition card to convert the output signal of the circuit into a digital signal. The structure and package of the sensor are introduced. The sensor sensing principle and signal conditioning circuit are analyzed. The output of the sensor is tested, calibrated, and the relationship between the GMI effect of the amorphous wire and the excitation current frequency is explored. The sensor supplies voltage is ±5 V, and the excitation signal is a square wave signal with a frequency of 60 MHz and an amplitude of 1.2 V generated by the quartz crystal. The sensor has the largest GMI effect at 60 MHz with a sensitivity of 4.8 V/Oe and a resolution of 40 nT.

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“…Figure 1 shows the principle diagram of the normal MI magnetic sensor. For this kind of MI magnetic sensor, an electrical connection was needed, and a special method was proposed to make good electrical connection with the amorphous wire [22]. The electrical connection increased the complexity of element fabrication and caused the Joule heat loss of the material.…”

mentioning

confidence: 99%

PT-Level High-Sensitivity Magnetic Sensor with Amorphous Wire

2019

Sensors

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A picotesla (PT) level high-sensitivity magnetic sensor with amorphous wire was developed. The magnetic sensor was composed of a (Fe0.06Co0.94)72.5Si2.5B15 (FeCoSiB) amorphous wire with a coil wound around it. The amorphous wire had a diameter of 0.1 mm and a length of 5 mm. The coil was 30 turns. There was no electrical connection with the amorphous wire. The sensor was biased by an alternating current (AC) of about 1 MHz and a direct current (DC). To increase the sensitivity, a resonant circuit was used, and the signal amplitude of the magnetic sensor was increased 10 times from 10 mV/Gauss to about 100 mV/Gauss. The magnetic field resolution was improved 5 times from 30 pT/√Hz to 6 pT/√Hz. An eddy current testing system with a magnetic sensor was developed, and the artificial defects in an aluminum plate were evaluated.

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Improving the Electrical Contact Performance for Amorphous Wire Magnetic Sensor by Employing MEMS Process

Cited by 9 publications

References 20 publications

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish

Polishing of Silicon Nitride Ceramic Balls by Clustered Magnetorheological Finish

Highly Integrated MEMS Magnetic Sensor Based on GMI Effect of Amorphous Wire

PT-Level High-Sensitivity Magnetic Sensor with Amorphous Wire

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