Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model

Song, Changhui; Zhang, Xuejun; Zhang, Xin; Hu, Haitian; Zeng, Xuefeng

doi:10.1007/s13320-017-0400-x

Cited by 6 publications

(4 citation statements)

References 17 publications

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“…Rigid conformal lap polishing. In 2009, Kim and Burge proposed a rigid conformal polishing tool that conforms to the aspheric shape yet maintains stability to provide natural smoothing for high spatial-frequency errors on the workpiece [167][168][169]. The tool uses an elastic rubber paste called Silly-Putty ® as the deformed layer of the polishing tool, as shown in figure Silly-Putty is an organosilicon polymer and a nonlinear viscoelastic non-Newtonian fluid [170].…”

Section: Stressed-lap Polishingmentioning

confidence: 99%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

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Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have been achieved in the area of high-precision manufacturing technologies, where the form accuracy approaches the nanometer level and surface roughness the atomic level. These extremely high precision manufacturing technologies enable the development of high-performance optical elements, semiconductor substrates, biomedical parts, and so on, thereby enhancing the ability of human beings to explore the macro- and microscopic mysteries and potentialities of the natural world. In this paper, state-of-the-art high-precision material removal manufacturing technologies, especially ultraprecision cutting, grinding, deterministic form correction polishing, and supersmooth polishing, are reviewed and compared with insights into their principles, methodologies, and applications. The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

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Section: Stressed-lap Polishingmentioning

confidence: 99%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

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“…Building on Kim's work, Su et al [22] introduced a parametric smoothing model to describe the smoothing of complex surfaces. Song et al [23] proposed a time-varying smoothing model that included specific factors related to smoothing efficiency based on the parametric smoothing model and Preston's equation. The smoothing efficiency of the rigid conformal polishing pad can be maximized by utilizing the time-varying smoothing model.…”

Section: Introductionmentioning

confidence: 99%

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

He,

Hai,

et al. 2024

Micromachines

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Elastic spherical polishing tools effectively conform to the polishing surface and exhibit high efficiency in the removal of materials, so they are extensively used in the sub-aperture polishing stages of optical components. However, their processing is often accompanied by significant mid-spatial frequency (MSF) errors, which critically degrade the performance of optical systems. To suppress the MSF errors generated during polishing with spherical tools, this study investigates the influence factor of MSF errors during the polishing process through an analysis of the convolution effect in material removal. A material removal profile model is established, and a uniform removal simulation is conducted to assess the influence of different shape material removal profiles on MSF errors. Simulation and experimental results show that a Gaussian-like shape material removal profile is more effective in suppressing the MSF errors during polishing compared to the “W” and trapezoidal shape material removal profiles. In addition, based on the characteristics of the RMS decreasing in a serrated trend with the decrease in path spacing, a path spacing optimization method considering the polishing efficiency is proposed to improve the polishing efficiency while controlling the MSF errors, and the effectiveness of the path spacing optimization method is verified by comparing the MSF error at the maximum theoretical path spacing and the path spacing that is less than this. Finally, the path spacing optimization method is used to polish single-crystal silicon to further illustrate its practicality.

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“…Reference [10] studied the satellite attitude control ground laboratory platform. Reference [11] proposed several algorithms to estimate the quality of air-bearing test-bed, and the validity of the method was tested by the experiment.…”

Section: Introductionmentioning

confidence: 99%

A Monocular Vision Measurement System of Three-Degree-of-Freedom Air-Bearing Test-Bed Based on FCCSP

Gao

et al. 2018

Photonic Sens

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A monocular vision-based pose measurement system is provided for real-time measurement of a three-degree-of-freedom (3-DOF) air-bearing test-bed. Firstly, a circular plane cooperative target is designed. An image of a target fixed on the test-bed is then acquired. Blob analysis-based image processing is used to detect the object circles on the target. A fast algorithm (FCCSP) based on pixel statistics is proposed to extract the centers of object circles. Finally, pose measurements can be obtained when combined with the centers and the coordinate transformation relation. Experiments show that the proposed method is fast, accurate, and robust enough to satisfy the requirement of the pose measurement.

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Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model

Cited by 6 publications

References 17 publications

Manufacturing technologies toward extreme precision

Manufacturing technologies toward extreme precision

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

A Monocular Vision Measurement System of Three-Degree-of-Freedom Air-Bearing Test-Bed Based on FCCSP

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