Improving measurement efficiency of complex transistor structures using surface plasmon resonances
Yi Song,
Qimeng sun,
Yunfei Song
et al.
Abstract:Mueller matrix spectroscopy ellipsometry (MMSE) combined with machine learning method is a promising metrology tool for assisting high-volume production of complex transistor structures such as Gate-all-around (GAA). Conventional wide-spectrum MMSE cannot avoid measurement errors caused by large dispersions. In the meantime, the large amount of data in wide-spectrum reduces the metrology efficiency. In this work, a new metrology method is developed using the effects of near-field electric fields. First, two im… Show more
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