2014
DOI: 10.1063/1.4871551
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Improving environmental noise suppression for micronewton force sensing based on electrostatic by injecting air damping

Abstract: A micro/nano force can be traced to the International System of Units by means of an electrostatic force balance weight system. However, the micro/nano force measurement system is susceptible to environmental disturbances. Various methods have been proposed to reduce the effect of environmental disturbances and obtain high resolution and fast response. In this paper, we introduce a combination of air damping and inherent damping from the internal molecular friction of spring suspension. This will optimize syst… Show more

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Cited by 26 publications
(13 citation statements)
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“…The gold-painting cantilever and electrode make up a parallel plate capacitor. Based on the principle of virtual work, [18][19][20] electrostatic force F e would be generated supplied by DC voltage, U s , by Eq. (2):…”
Section: Principle Of the Optical Lever Calibrationmentioning
confidence: 99%
“…The gold-painting cantilever and electrode make up a parallel plate capacitor. Based on the principle of virtual work, [18][19][20] electrostatic force F e would be generated supplied by DC voltage, U s , by Eq. (2):…”
Section: Principle Of the Optical Lever Calibrationmentioning
confidence: 99%
“…The measurement of micro/nanoforces is of great importance in both science and engineering [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15]. It is useful in the fields of precision instruments, biology [16,17], magnetic field distributions [18], distance measurement [19], and tribological properties of materials [20][21][22][23].…”
Section: Introductionmentioning
confidence: 99%
“…In this study, the stiffness of AFM cantilever is calibrated by an electrostatic system [2,9] using the force-displacement curve. In general, for microforce measurements, the signal would be drowned in noise and cannot be measured accurately.…”
Section: Introductionmentioning
confidence: 99%
“…The small force measurement is very important with development of the technology [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. It involves precision instrument, MEMS [1,2], biology [12,13], magnetic field distributions [14,15], and tribological properties of material [16][17][18][19].…”
Section: Introductionmentioning
confidence: 99%
“…Improving the environment is one way to reduce the effect of noise. Song introduced air damping to improve environmental noise suppression [11]. In this paper, we introduce the differential method force measurement (DFM) to reduce the effect of noise.…”
Section: Introductionmentioning
confidence: 99%