Abstract:This study grew high quality vertically-aligned InGaAs quantum dots (QDs) on a GaAs (001) substrate by using the molecular beam epitaxy system. The GaAsSb/AlGaAsSb composite overgrown layer was adopted to cap on InGaAs QDs for improving the dot size uniformity. From the experimental results, the Sb-contained overgrown layer was observed to reduce the In-Ga intermixing and contribute to the enhancement of the dot-size uniformity. Through the measurements of transmission emission microscopy, energy-dispersive X-… Show more
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