Improvements in the Vacuum System of a VDG Accelerator Used for Clean Ion Implantation

Chaturvedi, U. K.; Shrinet, V.; Agrawal, S.K.; Nigam, A.K.

doi:10.1007/978-3-642-69156-0_22

Ion Implantation: Equipment and Techniques 1983

DOI: 10.1007/978-3-642-69156-0_22

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Improvements in the Vacuum System of a VDG Accelerator Used for Clean Ion Implantation

U. K. Chaturvedi

V. Shrinet

S.K. Agrawal

et al.

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1988

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Improvements in the Vacuum System of a VDG Accelerator Used for Clean Ion Implantation

Cited by 1 publication

References 8 publications

Suitability of ion pump for evacuation of a closed He cycled Mössbauer cryostat

Suitability of ion pump for evacuation of a closed He cycled Mössbauer cryostat

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