2020
DOI: 10.1016/j.spmi.2020.106456
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Improvement of transparent conductive properties of GZO/Cu/GZO tri-layer films by introducing H2 into sputtering atmosphere

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Cited by 8 publications
(5 citation statements)
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“…According to Haacke, the optical and electrical properties of transparent conductive oxide (TCO) films are best characterized via electrical sheet resistance and optical transmittance. Therefore, the FOM value was defined as an important parameter for evaluating the performance and determining the material quality of the films [ 45 , 46 , 47 , 48 ]. It is calculated using Equation (6) below.…”
Section: Resultsmentioning
confidence: 99%
“…According to Haacke, the optical and electrical properties of transparent conductive oxide (TCO) films are best characterized via electrical sheet resistance and optical transmittance. Therefore, the FOM value was defined as an important parameter for evaluating the performance and determining the material quality of the films [ 45 , 46 , 47 , 48 ]. It is calculated using Equation (6) below.…”
Section: Resultsmentioning
confidence: 99%
“…[24] So the bandgap of ZTO thin film shall increase, which can be verified by the bandgap broadening of Ga-doped ZnO sputtering under H 2 containing atmosphere. [16] Based on the calculation by Li et al, the CBO at the CZTSSe/ZTO can reach the maximum value around 0.03 eV, when the bandgap of CZTSSe is 1.08 eV. [7] This model can be applied to CZTSe solar cells.…”
Section: Defect Modulation By Hydrogen-assisted Reactive Sputteringmentioning
confidence: 99%
“…[15] Furthermore, the modification of carriers density, resistivity, and bandgap for ZnO:Ga by introducing H 2 into sputtering atmosphere has been demonstrated. [16] Consequently, the incorporation of H 2 during sputtering process may also improve the properties of ZTO and thus the quality of heterojunction.…”
Section: Introductionmentioning
confidence: 99%
“…A 7 nm thick Cu layer sandwiched between Ga-doped ZnO films exhibited an average transmittance of >70% in the visible-light range. 23 To improve the transmittance, an anti-reflection (AR) layer of a dielectric material, such as AlN, 24 Al 2 O 3 , 25 SiO 2 , 26 SiON, 27 or SiN x , 28 was added on the metal layer.…”
Section: Introductionmentioning
confidence: 99%
“…fabricated a coating of aluminum-doped zinc oxide (AZO)/Ag/AZO­(40/12/40 nm) with an optical transmittance of >80% in the region of 380–780 nm. A 7 nm thick Cu layer sandwiched between Ga-doped ZnO films exhibited an average transmittance of >70% in the visible-light range . To improve the transmittance, an anti-reflection (AR) layer of a dielectric material, such as AlN, Al 2 O 3 , SiO 2 , SiON, or SiN x , was added on the metal layer.…”
Section: Introductionmentioning
confidence: 99%