2014
DOI: 10.1016/j.proeng.2014.11.316
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Improvement of the Thermal Resistance of Thin Film Heaters on Glass Substrate for Lab-on-Chip Applications

Abstract: This paper describes a novel and easily manufacturable method for increasing the thermal resistance of microheaters fabricated on glass substrates, thus decreasing the thermal dissipation of the devices. An automatic sawing machine was exploited to dig 240 μm wide trenches in order to thermally isolate the heater from the glass substrate and four different layouts of the trenches have been investigated. An improvement of the thermal resistance up to 217% on a heat sink and 30% in air has been obtained. The the… Show more

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Cited by 3 publications
(1 citation statement)
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“…An acceptable precision is achievable in the range of the fill factor FF ps = 0.7 − 0.85. The fill factor can be altered by varying the isolation distance η according to Equation (8). Additionally, it is a good design practice for η to be accepted as little as possible at the beginning of the design procedure, as it will be resized after the final number of traces is calculated.…”
mentioning
confidence: 99%
“…An acceptable precision is achievable in the range of the fill factor FF ps = 0.7 − 0.85. The fill factor can be altered by varying the isolation distance η according to Equation (8). Additionally, it is a good design practice for η to be accepted as little as possible at the beginning of the design procedure, as it will be resized after the final number of traces is calculated.…”
mentioning
confidence: 99%