The variations in structure and optical properties of amorphous a-Se and aM 5 Se 95 (M = Ge, Ga and Zn) films have been studied based on FTIR and optical measurements. FTIR transmittance spectra for a-Se and aM 5 Se 95 (M = Ge, Ga and Zn) glasses were measured as a function of wavenumber. The addition of Ge, Ga and Zn increases the vibrational frequency of the a-Se main band. The absorption edge of Ge 5 Se 95 shifted towards long side of the wavelength in comparison with that of a-Se film. This shift increases gradually in the case of Ga 5 Se 95 and Zn 5 Se 95 films. So, the optical bandgap of M 5 Se 95 films was decreased, but the index of refraction was increased. The first and third order of electric susceptibility (χ (1) and χ (3)) and non-linear index of refraction (n 2) were increased by adding Ge, Ga and Zn into a-Se.