Improvement of structure of frequency-change-type three-axis acceleration sensor

Abstract

In the frequency-change-type three-axis acceleration sensor developed so far, the frequency-change rate in the z-axis direction of its thickness direction was considerably smaller than the change rates in the x- and y-axis directions of its plane direction. As a method for increasing the small change rate, a sensory structure was proposed in which the mass was sandwiched between two right-angled vibrators. However, there was a problem that the structure became three-dimensional and complicated. Therefore, simplification of the structure has been considered desirable. Here, to simplify the structure and increase the sensitivity, an improved new frequency-change-type three-axis acceleration sensor is proposed in which all of the vibrators are arranged only on the upper surface of the mass. The sensor characteristics were analyzed by the finite element method, and verified experimentally.

Research on multi-objective collaborative control of complex product development in equipment manufacturing industry

“…The performance indicator function is a function that maps one or more performance indicators to a real number that visually represents the "cost" associated with the performance indicator. Relative velocity, distance error between structures or components, acceleration control amount, acceleration rate of change, and reference acceleration are taken as performance metrics, respectively [28][29]. Scalar-valued utility functions and multi-objective performance indicator functions ( 4) and ( 5) are defined according to Eqs.…”

Study on micropillar arrangement optimization of wireless-electrodeless quartz crystal microbalance sensor and application to a gas sensor

“…[7][8][9] Research on QCM sensors has been undertaken for a long time, however, in recent years, research on useful devices focusing on piezoelectric materials other than the quartz crystal has also been actively undertaken. [10][11][12][13][14][15][16][17][18] The QCM sensor is based on a mass detection sensor that detects the mass loading caused by binding between the target substance and the sensitive film formed on the surface of the thin quartz oscillator, which vibrates in the thickness-shear resonance, as a resonance frequency change. Therefore, it is a useful sensor, which can be applied to various applications by appropriately choosing the sensitive film.…”