Improvement of sensitivity of ultrasonic beam induced resistance change (SOBIRCH) method with ultrasound resonance in mold resin

Matsui, Takuto; Tatsumi, Kosuke; Kawashima, T.; Murakami, Yoshinobu; Hozumi, Naohiro; Eura, Shigeru; Matsumoto, Toru

doi:10.1109/ipfa47161.2019.8984890

Cited by 1 publication

(2 citation statements)

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“…14) As an alternative, without the need for decapsulation, the authors propose the ultrasonic beam induced resistance change (SOBIRCH) method by replacing the laser of IR-OBIRCH with ultrasound. [15][16][17][18][19][20] Figure 1 shows a comparison between the conventional IR-OBIRCH and the proposed SOBIRCH. The origin of the signal of IR-OBIRCH is based on the laser heating of faults, with need for the decapsulation of the mold resin.…”

Section: Introductionmentioning

confidence: 99%

“…In the previous studies, it was suggested that the intensity of the SOBIRCH signal can be significantly improved by appropriately tuning the ultrasound frequency since the ultrasound resonance occurs in the mold resin. 19,20) The resonant frequency in the mold resin is determined by the speed of sound and the thickness of mold resin. However, in some cases of practical fault localization, since both speed of sound and thickness of mold resin are not precisely known, the resonant frequency is not easily obtained.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Frequency determination in nondestructive test of semiconductor devices with ultrasound heating

Matsui

Tatsumi

Kawashima

et al. 2020

Jpn. J. Appl. Phys.

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The infrared-optical beam induced resistance change (IR-OBIRCH) method is widely used to localize faults of semiconductor devices. Prior to the fault localization, the IR-OBIRCH generally requires a decapsulation of mold resin that covers the semiconductor devices. As an alternative, without the need for decapsulation, the authors propose the ultrasonic beam induced resistance change (SOBIRCH) method. This research examined a determination method of the optimal ultrasound frequency in order to improve the signal intensity of SOBIRCH even if the speed of sound and the thickness of mold resin are unknown. The resonant frequency estimated by using frequency component of signals of reflected wave agreed with the ultrasound frequency that maximized the intensity of SOBIRCH signal. The frequency dependence of SOBIRCH signal was also estimated. This research demonstrated that the proposed frequency determination method can estimate the resonant frequency on the fault observation of a practical device.

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