Improvement of Resistive Switching Characteristic in Silicon Oxide-Based RRAM Through Hydride- Oxidation on Indium Tin Oxide Electrode by Supercritical CO&lt;sub&gt;2&lt;/sub&gt; Fluid

Chang, Kuan‐Chang; Tsai, Tsung‐Ming; Chang, Ting‐Chang; Zhang, Rui; Chen, Kai-Huang; Chen, Jung‐Hui; Chen, Min-Chen; Huang, Hui‐Chun; Zhang, Wei; Lin, Chih-Yang; Tseng, Yi-Ting; Lin, Hongyi; Zheng, Jin‐Cheng; Sze, Simon M.

doi:10.1109/led.2015.2426055

Cited by 25 publications

(9 citation statements)

References 19 publications

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“…The OH stretching vibration mode is related to the wavenumber of approximately 3240 cm −1 [ 34 , 35 , 36 , 37 , 38 , 39 ]. The wavenumber region of 650 to 1500 cm −1 corresponds to the typical signal of the ITO thin film, without significant difference, especially near the 1500 cm −1 peak, which originates from O–H bending vibration of absorption water [ 40 , 41 , 42 ]. In addition, the OH stretching vibration region (wavenumbers around 3240 cm −1 ) did not show any signals for either ITO:Zn or ITO:Ce thin films despite a high doping concentration of ZnO and CeO 2 (9 wt %).…”

Section: Resultsmentioning

confidence: 99%

Controlled Lattice Thermal Conductivity of Transparent Conductive Oxide Thin Film via Localized Vibration of Doping Atoms

et al. 2021

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Amorphization using impurity doping is a promising approach to improve the thermoelectric properties of tin-doped indium oxide (ITO) thin films. However, an abnormal phenomenon has been observed where an excessive concentration of doped atoms increases the lattice thermal conductivity (κl). To elucidate this paradox, we propose two hypotheses: (1) metal hydroxide formation due to the low bond enthalpy energy of O and metal atoms and (2) localized vibration due to excessive impurity doping. To verify these hypotheses, we doped ZnO and CeO2, which have low and high bond enthalpies with oxygen, respectively, into the ITO thin film. Regardless of the bond enthalpy energy, the κl values of the two thin films increased due to excessive doping. Fourier transform infrared spectroscopy was conducted to determine the metal hydroxide formation. There was no significant difference in wave absorbance originating from the OH stretching vibration. Therefore, the increase in κl due to the excessive doping was due to the formation of localized regions in the thin film. These results could be valuable for various applications using other transparent conductive oxides and guide the control of the properties of thin films.

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Section: Resultsmentioning

confidence: 99%

Controlled Lattice Thermal Conductivity of Transparent Conductive Oxide Thin Film via Localized Vibration of Doping Atoms

et al. 2021

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“…Sustainable supercritical CO 2 (SCCO 2 ) fluid technology − is capable of manipulating the material properties and structure in a simple and effective approach via utilizing and recycling CO 2 . The supercritical state, as the fourth phase state besides solid, liquid, and gas, refers to a special state in thermodynamics.…”

Section: Introductionmentioning

confidence: 99%

“…When the temperature and pressure surpass the critical point, substances will enter their supercritical fluid. Previous work proved that the SCCO 2 -related technology can enhance the dielectric properties of sputter-deposited films in a fast way , and passivate the defects at low temperature. ,,− However, the SCCO 2 method has not been exploited in preparing ZnO nanotubes. Taking advantage of its excellent material modulation characteristics, supercritical fluid technology is exploited in this research to prepare ZnO nanotubes, through which ultrathin ZnO nanotubes with an extremely thin wall are successfully fabricated.…”

Section: Introductionmentioning

confidence: 99%

Eco-Friendly, Highly Efficient Ethanol-Assisted Supercritical Preparation of an Ultrathin ZnO Nanotube

Chang

Zhou

et al. 2021

ACS Sustainable Chem. Eng.

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The nanotubes widely used in the advanced semiconductor manufacturing field suffer from complicated timeand energy-consuming synthesis processes, thus requiring an efficient preparation method. In this study, ethanol-assisted supercritical treatment (SC-EA), a sustainable approach with less environmental hazard, has been applied to efficiently synthesize ZnO nanotubes. Materials free from any detrimental effect on the environment have been utilized in the proposed ethanol−water mixed supercritical fluid technique to realize nanotube growth. High synthetic efficiency, eco-friendly processing, and an ultrasimple procedure are achieved in the SC-EA treatment at a low temperature and with a low preparation cost. The analysis results from scanning electron microscopy (SEM) and transmission electron microscopy (TEM) collectively confirm the successful synthesis of ZnO nanotubes with an ultrathin crystalline wall of only 3 nm. A chemical reaction model is established for a better understanding of the SC-EA process in which ethanol molecules act as the surfactants to help ZnO nanotubes grow by forming nanocells. Such a green supercritical methodology, by means of an eco-friendly synthesis system in achieving CO 2 reutilization and recycling, provides a bright future to modulate a variety of nanostructured materials in a facile and efficient way.

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“…The supercritical phase is characterized as high penetration of gas and solubility of liquid due to a special substance phase featuring the coexistence of liquid and gas phases. A little pure water (H2O) was added into supercritical CO2 fluids(SCCO2) so that supercritical H2O was achieve and obtained excellent oxidation ability at lower temperature [5]- [9].…”

Section: Introductionmentioning

confidence: 99%

P‐1.13: Supercritical Fluid Oxidation Methodology on a‐IZAO Thin‐Film Transistors

Liu

Zhang

et al. 2021

Symp Digest of Tech Papers

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A novel oxidation treatment of low‐temperature supercritical fluids is proposed in the research, which is able to improve the comprehensive performance of the a‐IGZO thin‐film transistors (TFTs) under low temperature. After the treatment, the subthreshold swing (SS) of the device is reduced from 0.44 V/dec to 0.24 V/dec. Meanwhile, the mobility and Ion/Ioff current ratio of the device are increased from 4.70 cm2/Vs to 8.53 cm2/Vs and 5.43x106 to 1.23x108, respectively. Through the material analysis including Fourier transform infrared spectroscopy (FTIR) and X‐ray photoelectron shows that the supercritical treatment improves the oxidation level of a‐IGZO layer and dielectric layer, and passivates the defects in the dielectric layer.

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Improvement of Resistive Switching Characteristic in Silicon Oxide-Based RRAM Through Hydride- Oxidation on Indium Tin Oxide Electrode by Supercritical CO<sub>2</sub> Fluid

Cited by 25 publications

References 19 publications

Controlled Lattice Thermal Conductivity of Transparent Conductive Oxide Thin Film via Localized Vibration of Doping Atoms

Controlled Lattice Thermal Conductivity of Transparent Conductive Oxide Thin Film via Localized Vibration of Doping Atoms

Eco-Friendly, Highly Efficient Ethanol-Assisted Supercritical Preparation of an Ultrathin ZnO Nanotube

P‐1.13: Supercritical Fluid Oxidation Methodology on a‐IZAO Thin‐Film Transistors

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