Improvement of microscopic and macroscopic uniformity in 4-inch InP substrate for IC application by vertical boat growth

Kawase, Tomohiro; Hosaka, N.; Hashio, K.; Matsushima, M.; Sakurada, T.; Nakai, Ryusuke

doi:10.1109/gaas.2002.1049048

24th Annual Technical Digest Gallium Arsenide Integrated Circuit (GaAs IC) Symposiu

DOI: 10.1109/gaas.2002.1049048

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Improvement of microscopic and macroscopic uniformity in 4-inch InP substrate for IC application by vertical boat growth

Tomohiro Kawase

N. Hosaka

K. Hashio

et al.

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Improvement of microscopic and macroscopic uniformity in 4-inch InP substrate for IC application by vertical boat growth

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References 2 publications

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