Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition

Pruchnik, Bartosz; Piasecki, Tomasz; Gacka, Ewelina; Masteghin, Mateus G.; Cox, David C.; Gotszalk, Teodor

doi:10.1109/jmems.2024.3377595

J. Microelectromech. Syst.

2024

DOI: 10.1109/jmems.2024.3377595

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Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition

Bartosz Pruchnik,

Tomasz Piasecki,

Ewelina Gacka

et al.

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Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition

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References 45 publications

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