2012
DOI: 10.1063/1.3669798
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Improvement of efficiency and temperature control of induction heating vapor source on electron cyclotron resonance ion source

Abstract: An electron cyclotron resonance ion source (ECRIS) is used to generate multicharged ions for many kinds of the fields. We have developed an evaporator by using induction heating method that can generate pure vapor from solid state materials in ECRIS. We develop the new matching and protecting circuit by which we can precisely control the temperature of the induction heating evaporator. We can control the temperature within ±15 °C around 1400 °C under the operation pressure about 10(-4) Pa. We are able to use t… Show more

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Cited by 3 publications
(1 citation statement)
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“…The IH-type iron evaporation source consists of a double induction heating coil made by Mo coils, and the IH power supply for consumer use is supplied as a power supply with a maximum of 6.4 kW with the insulated induction heating coil transformer (IHCT), which we have developed originally. In this experiment, the maximum input power to the power supply was mainly about 600 to 800 W. Please refer to the past literature for the heating characteristics of each evaporation source [11,13,16].…”
Section: Experimental Apparatusmentioning
confidence: 99%
“…The IH-type iron evaporation source consists of a double induction heating coil made by Mo coils, and the IH power supply for consumer use is supplied as a power supply with a maximum of 6.4 kW with the insulated induction heating coil transformer (IHCT), which we have developed originally. In this experiment, the maximum input power to the power supply was mainly about 600 to 800 W. Please refer to the past literature for the heating characteristics of each evaporation source [11,13,16].…”
Section: Experimental Apparatusmentioning
confidence: 99%