2014
DOI: 10.4028/www.scientific.net/amr.1008-1009.1144
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Improvement of Edge Etcher System

Abstract: The edge etcher machine is fully automated with very dangerous chemical circumstance; the shortcoming is low capacity for production, it spends too much time on the centering process, we use vision system to reduce the time of centering process and increase the capacity of production.

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