2009
DOI: 10.1143/jjap.48.076001
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Improvement of Compact Electron-Beam-Excited Plasma Source for Increased Producible Plasma Density

Abstract: Multiple modifications of graphite electrodes of a compact electron-beam-excited plasma (EBEP) source to enhance the cooling efficiency of the electrodes resulted in an increase in the maximum value of producible EBEP density. In addition, experiments on surface nitriding of steel samples in nitrogen EBEP demonstrated that the improved compact EBEP source with modified electrodes outperforms one with conventional electrodes, thereby demonstrating the significant advantage of using the improved source for a wid… Show more

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Cited by 10 publications
(5 citation statements)
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“…The sample is a circular disk (20 mm in diameter and 4 mm in thickness) of tool steel JIS SKD61 which is frequently used to benchmark nitriding treatments. 4,7,12,18) The composition is as follows: 0.38% C, 0.42% Mn, 0.92% Si, 5.12% Cr, 1.19% Mo, and 0.8% V. The hardness of the base material is adjusted to 550 HV by heat treatment. The surface is mirror-finished with alumina powder and degreased in an ultrasonic acetone bath.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…The sample is a circular disk (20 mm in diameter and 4 mm in thickness) of tool steel JIS SKD61 which is frequently used to benchmark nitriding treatments. 4,7,12,18) The composition is as follows: 0.38% C, 0.42% Mn, 0.92% Si, 5.12% Cr, 1.19% Mo, and 0.8% V. The hardness of the base material is adjusted to 550 HV by heat treatment. The surface is mirror-finished with alumina powder and degreased in an ultrasonic acetone bath.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…For practical applications of TiN formation, conventional plasma nitriding methods have several disadvantages owing to large vacuum systems [19][20][21][22][23][24][25][26][27][28][29][30][31], which complicate treatment processes and cause difficulties in self-manufacturing in medical/dental fields. To resolve these disadvantages, this study investigated a novel nitriding method using atmospheric-pressure plasmas.…”
mentioning
confidence: 99%
“…More importantly, it is well known that nitriding can yield a hard layer, called the diffusion layer, beneath the titanium nitride layer. [14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31] The consequent improvements in the mechanical properties such as surface hardness and wear resistance will promote titanium further as a material for biomedical components.…”
mentioning
confidence: 99%
“…In general, plasma nitriding is performed under low pressure so that the conventional method requires vacuum systems and a long treatment time. [14][15][16][17][18][19][20][21][22][23][24][25][26][27] In order to eliminate these shortcomings of conventional plasma nitriding, we have developed a new plasma-jet nitriding technology operated under atmospheric pressure. Other advantages of atmospheric-pressure operation include the ability to produce high-density reactive species and the absence of electric-field concentration, in contrast to low-pressure plasmas.…”
mentioning
confidence: 99%