Improved zero-order fringe positioning algorithms in white light interference based atomic force microscopy

Chi, Hu; Liu, Xiaojun; Yang, Wenjun; Lu, Wenlong; Yu, Nengguo; Chang, Suping

doi:10.1016/j.optlaseng.2017.07.010

Cited by 27 publications

(11 citation statements)

References 20 publications

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“…Reduction of this type of error can provide a better resolution, which also reduces the bandwidth of the sensor. For White Light Interference-based Atomic Force Microscopy (WLIAFM), the HFN method used in the interference signals from the photoelectric devices and the different light is inevitable [ 14 ]. These factors lead to the distortion of the interference signals and reduce the sense of the zero-order fringe positioning method [ 15 , 16 ], applied in the WLIAFM approach.…”

Section: Introductionmentioning

confidence: 99%

Suppression of the High-Frequency Errors in Surface Topography Measurements Based on Comparison of Various Spline Filtering Methods

Podulka

2021

Materials

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The metrology of so-called “engineering surfaces” is burdened with a substantial risk of both measurement and data analysis errors. One of the most encouraging issues is the definition of frequency-defined measurement errors. This paper proposes a new method for the suppression and reduction of high-frequency measurement errors from the surface topography data. This technique is based on comparisons of alternative types of noise detection procedures with the examination of profile (2D) or surface (3D) details for both measured and modelled surface topography data. In this paper, the results of applying various spline filters used for suppressions of measurement noise were compared with regard to several kinds of surface textures. For the purpose of the article, the influence of proposed approaches on the values of surface topography parameters (from ISO 25178 for areal and ISO 4287 for profile standards) was also performed. The effect of the distribution of some features of surface texture on the results of suppressions of high-frequency measurement noise was also closely studied. Therefore, the surface topography analysis with Power Spectral Density, Autocorrelation Function, and novel approaches based on the spline modifications or studies of the shape of an Autocorrelation Function was presented.

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Section: Introductionmentioning

confidence: 99%

Suppression of the High-Frequency Errors in Surface Topography Measurements Based on Comparison of Various Spline Filtering Methods

Podulka

2021

Materials

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“…(10) and (11), and the accurate position is realized with PSI as Eq. (12). It can be seen that the correlations with pressure of centroid and envelope methods are worse than other methods because both of them suffer from the distortion of the whole fringe pattern.…”

Section: Resultsmentioning

confidence: 96%

“…This method requires much less computation than phase-based algorithm, thus can achieve high-speed demodulation. However, the fringe pattern is susceptible to the distortion of the interference pattern [12], so it is hard to realize high accuracy. In 2014, Wang et al [13] retrieved the peak position of zero-order fringe pattern and thus improved the precision of LCI.…”

Section: Introductionmentioning

confidence: 99%

A Demodulation Method of Spatial Domain for Low-Coherence Interferometry With High Accuracy and Adaptability

et al. 2020

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A demodulation method of spatial domain based on low-coherence interferometry is proposed. The original signal of spatial domain acquired by linear CCD is filtered with all-phase filter to obtain the fringe pattern, and the phase signal of the spatial frequency domain is retained after filtering. The fringe pattern analysis is employed to avoid phase ambiguity and realize large measurement range in demodulation. Afterwards, using the centroid position of the fringe, the peak position of a single fringe pattern can be obtained, and finally the accurate peak position is calculated with seven-step phase-shifting interferometry. The demodulation method is demonstrated experimentally with Fabry-Perot sensing system. At room temperature, it is proved that the full-scale measurement error is less than 0.019% in the range of 11 kPa to 290 kPa. From −20°C to 70°C, the accuracy is stable and the maximum error is less than 0.054 kPa. The demodulation method has the potential to enhance the measurement accuracy and adaptability in actual environment for universal applications.

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“…AFM, in general, includes five major components: the cantilever probe, the detection system, the tip-sample motion system, the feedback controller, and the image processing and display system [ 8 ]. To detect the bending of the cantilever, various methods, such as optical interferometric [ 9 , 10 ], optical lever [ 1 , 8 , 11 ], and capacitance sensing [ 12 ] methods, are employed. Among them, the most commonly used detection method is the optical lever detection method.…”

Section: Introductionmentioning

confidence: 99%

Error Analysis of the Combined-Scan High-Speed Atomic Force Microscopy

Kong

et al. 2021

Sensors

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A combined tip-sample scanning architecture can improve the imaging speed of atomic force microscopy (AFM). However, the nonorthogonality between the three scanners and the nonideal response of each scanner cause measurement errors. In this article, the authors systematically analyze the influence of the installation and response errors of the combined scanning architecture. The experimental results show that when the probe in the homemade high-speed AFM moves with the Z-scanner, the spot position on the four-quadrant detector changes, thus introducing measurement error. Comparing the experimental results with the numerical and theoretical results shows that the undesired motion of the Z-scanner introduces a large error. The authors believe that this significant error occurs because the piezoelectric actuator not only stretches along the polarization direction but also swings under nonuniform multifield coupling. This article proposes a direction for further optimizing the instrument and provides design ideas for similar high-speed atomic force microscopes.

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Improved zero-order fringe positioning algorithms in white light interference based atomic force microscopy

Cited by 27 publications

References 20 publications

Suppression of the High-Frequency Errors in Surface Topography Measurements Based on Comparison of Various Spline Filtering Methods

Suppression of the High-Frequency Errors in Surface Topography Measurements Based on Comparison of Various Spline Filtering Methods

A Demodulation Method of Spatial Domain for Low-Coherence Interferometry With High Accuracy and Adaptability

Error Analysis of the Combined-Scan High-Speed Atomic Force Microscopy

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