Improved reliability of breakdown voltage measurement of yttrium oxide coatings by plasma spray

Song, Je Boem; Choi, Eun-Mi; Oh, Seong‐Geun; So, Jongho; Lee, Seung Su; Kim, Jin Tae; Yun, Ju-Yong

doi:10.1016/j.ceramint.2019.07.238

Cited by 12 publications

(2 citation statements)

References 32 publications

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“…Very recent research on the erosion behavior of Y2O3 in fluorine-based etching plasma reported that oxide ceramic materials such as Y2O3 were eroded by a physiochemical mechanism, and it revealed that the material orientation is also related to the surface plasma interaction [20]. The limitation of this research is the absence of the material hardness [21] and electrical breakdown analysis [22], which can be good representations of the endurance of the material from the plasma ion bombard- Y3d in YOF also suggested that YOF had little bonding distortion upon plasma exposure. Y3d peaks showed that YOF sustained its yttrium-based bonding, even after long-term plasma exposure.…”

Section: Chemical Bondingmentioning

confidence: 88%

Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma

2021

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Coating the inner surfaces of high-powered plasma processing equipment has become crucial for reducing maintenance costs, process drift, and contaminants. The conventionally preferred alumina (Al2O3) coating has been replaced with yttria (Y2O3) due to the long-standing endurance achieved by fluorine-based etching; however, the continuous increase in radio frequency (RF) power necessitates the use of alternative coating materials to reduce process shift in a series of high-powered semiconductor manufacturing environments. In this study, we investigated the fluorine-based etching resistance of atmospheric pressure-sprayed alumina, yttria, yttrium aluminum garnet (YAG), and yttrium oxyfluoride (YOF). The prepared ceramic-coated samples were directly exposed to silicon oxide etching, and the surfaces of the plasma-exposed samples were characterized by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and X-ray photoelectron spectroscopy. We found that an ideal coating material must demonstrate high plasma-induced structure distortion by the fluorine atom from the radical. For endurance to fluorine-based plasma exposure, the bonding structure with fluoride was shown to be more effective than oxide-based ceramics. Thus, fluoride-based ceramic materials can be promising candidates for chamber coating materials.

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Section: Chemical Bondingmentioning

confidence: 88%

Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma

2021

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“…As starting materials, both solid wires of metals and alloys (copper, aluminum, iron, titanium, nickel, chromium, molybdenum, tungsten, various alloys, etc.) and powder materials of various compositions are used [15][16][17][18]. Spraying using powder and wire materials is carried out using plasma torches of sufficiently high power.…”

Section: Introductionmentioning

confidence: 99%

Microplasma-Sprayed V2O5/C Double-Layer Coating for the Parts of Mini-Hydropower Systems

2020

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The development of novel designs for hydropower plants is of high interest nowadays. Studies have shown the negative effect of fluid flow on the turbines of mini-hydropower plants when using them in the conditions of the mountain river. To reduce the damage caused by cavitation, a microplasma coating technique has been chosen. Due to its wetting ability, low density, high thermal conductivity, high heat resistance and low chemical activity, graphite has been studied as a coating material. Vanadium pentoxide has been added as an interlayer to increase the wear resistance, corrosion resistance, and adhesion of the system. The microstructure of the system was studied using scanning electron microscopy and transmission electron microscopy. Functional properties of the system were tested by microhardness tests, wear resistance tests (friction), corrosion tests, and pull-off tests. The surface of the coating was homogeneous without warping, swelling and cracking. The microstructure consisted of regular structures in the form of branches of dendrites. V2O5/C coating resulted in the increase in microhardness up to 2534 MPa. The wear resistance (volume loss) of the sample with double-layer coating was 0.14 mm3 and the maximum adhesion strength was 17.5 MPa. Thus, the double-layer microplasma V2O5/C coating was applied and studied for strengthening the blades of mini-HPP. The microplasma method can find application in modifying the surface of power equipment subjected to the cavitation effect of the river water.

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Oxidation Behavior and High Temperature Friction and Wear Resistance of TiN-VC Reinforced VN Alloy/Co-Based Composite Coatings by Laser Cladding

Lin

Wang

et al. 2022

J. of Materi Eng and Perform

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Improved reliability of breakdown voltage measurement of yttrium oxide coatings by plasma spray

Cited by 12 publications

References 32 publications

Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma

Surface Analysis of Chamber Coating Materials Exposed to CF4/O2 Plasma

Microplasma-Sprayed V2O5/C Double-Layer Coating for the Parts of Mini-Hydropower Systems

Oxidation Behavior and High Temperature Friction and Wear Resistance of TiN-VC Reinforced VN Alloy/Co-Based Composite Coatings by Laser Cladding

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