Improved piezoelectric actuators for use in high-speed pulsed valves

Abstract

We describe the assembly of piezoelectric actuators suitable for use in Proch-Trickl pulsed gas valves employed in pulsed molecular beam experiments. In their simplest form, these actuators have performance equal to and resistance to chemical attack far superior to the recently discontinued commercial actuator around which the valve was originally designed. New actuators have been designed employing several different dual piezo configurations. The dual piezo design reliably produces shorter pulses than the original actuator, resulting in reduced gas consumption and lower average source chamber pressures for a given backing pressure and pulse rate. By electrically isolating the actuator assembly, active adjustment of the closed position may be achieved by simple addition of a continuous voltage bias.

High-intensity coherent vacuum ultraviolet source using unfocussed commercial dye lasers

“…The C 6 H 5 Cl beam was produced by bubbling H 2 carrier gas (20 psi (gauge)) through a room-temperature liquid C 6 H 5 Cl sample and expanding the mixture through the 1 mm orifice of a piezoelectrically actuated pulsed valve. 28,29 The molecular beam was skimmed by a 2 mm diameter skimmer before entering the main chamber and crossing the O 2 beam. The O 2 beam was produced by expanding a 40% O 2 in He mixture (40 psi (gauge)) through the 1 mm orifice of a second piezoelectrically actuated pulsed valve.…”

Pulsed Supersonic Beams from High Pressure Source: Simulation Results and Experimental Measurements

“…Many designs of pulsed beam sources are based on various actuating mechanisms (mechanical [6], Lorenz force [7][8][9], Piezo driver [10,11], or electromagnetic [12][13][14][15][16][17]). Several years ago we introduced a shaped nozzle, which combined with a high pressure fast-acting pulsed valve enabled us to reach high beam intensities and lower jet temperatures than what was previously available [18,19].…”

Real-time adjustable, 11 μs FWHM, >5 kHz, piezo electric pulsed atomic beam source

“…In addition to the technical advantages of our design, it is simple, and easy to construct and operate. [8] 1980 300 20 1 Cross and Valentini [9] 1981 100 750 14 Proch and Trickl [5] [10] 1989 150 1000 30 Irimia et al [6] 2009 7 5000 20-30 Proctor, Albert and Davis [11] 2010 60 1000 30 Abeysekera et al [7] 2014 20 100 6…”