Improved isoprene detection performance of Si-doped WO<sub>3</sub> films deposited by sputtering and post-annealing

Lin, Pin-Kuan; Qin, Yi; Qi, Xiaoding; Huang, Liji

doi:10.1039/d4ra00184b

RSC Adv.

2024

DOI: 10.1039/d4ra00184b

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Improved isoprene detection performance of Si-doped WO₃ films deposited by sputtering and post-annealing

Pin-Kuan Lin,

Yi Qin,

Xiaoding Qi

et al.

Abstract: Sputtered films of Si-doped WO3 showed a good selective sensing for isoprene with rapid response/recovery times, which were less than 1.5 and 3.0 seconds, respectively.

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Recent Applications and Future Trends of Nanostructured Thin Films-Based Gas Sensors Produced by Magnetron Sputtering

Moura,

Sério

2024

Coatings

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The field of gas sensors has been developing for the last year due to the necessity of characterizing compounds and, in particular, volatile organic compounds whose detection can be of special interest in a vast range of applications that extend from clinical evaluation to environmental monitoring. Among all the potential techniques to develop sensors, magnetron sputtering has emerged as one of the most suitable methodologies for the production of large-scale uniform coatings, with high packing density and strong adhesion to the substrate at relatively low substrate temperatures. Furthermore, it presents elevated deposition rates, allows the growth of thin films with high purity, permits a precise control of film thickness, enables the simple manufacturing of sensors with low power consumption and, consequently, low costs involved in the production. This work reviewed all the current applications of gas sensors developed through magnetron sputtering in the field of VOCs assessment by gathering the most relevant scientific works published. A total of 10 compounds were considered for this work. Additionally, 13 other compounds were identified as promising targets and classified as future trends in this field. Overall, this work summarizes the state-of-the-art in the field of gas sensors developed by magnetron sputtering technology, allowing the scientific community to take a step forward in this field and explore new research areas.

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Recent Applications and Future Trends of Nanostructured Thin Films-Based Gas Sensors Produced by Magnetron Sputtering

Moura,

Sério

2024

Coatings

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show abstract

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Improved isoprene detection performance of Si-doped WO₃ films deposited by sputtering and post-annealing

Abstract: Sputtered films of Si-doped WO3 showed a good selective sensing for isoprene with rapid response/recovery times, which were less than 1.5 and 3.0 seconds, respectively.

Cited by 1 publication

References 48 publications

Recent Applications and Future Trends of Nanostructured Thin Films-Based Gas Sensors Produced by Magnetron Sputtering

Recent Applications and Future Trends of Nanostructured Thin Films-Based Gas Sensors Produced by Magnetron Sputtering

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Improved isoprene detection performance of Si-doped WO3 films deposited by sputtering and post-annealing

Abstract: Sputtered films of Si-doped WO3 showed a good selective sensing for isoprene with rapid response/recovery times, which were less than 1.5 and 3.0 seconds, respectively.

Cited by 1 publication

References 48 publications

Recent Applications and Future Trends of Nanostructured Thin Films-Based Gas Sensors Produced by Magnetron Sputtering

Recent Applications and Future Trends of Nanostructured Thin Films-Based Gas Sensors Produced by Magnetron Sputtering

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Product

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Improved isoprene detection performance of Si-doped WO₃ films deposited by sputtering and post-annealing