“…For that purpose, it seems effective to improve the crystal quality of epitaxial structures, which would allow the diode characteristics closer to be ideal ones with less carrier recombination and generation processes and thereby enlarge the shunt resistance R sh as well as V OC , resulting in high PE and FF [8,13,24]. In this study, therefore, we grew the GaInN MQW PT structure using a high-crystalquality free-standing (FS) GaN substrate as an underlying growth substrate instead of the sapphire substrate we have ever used [8,21,22]. In addition, to investigate their effects on the surface reflectance and its contribution to the device performance, we considered an adoption of a wet surface treatment with a tetramethyl ammonium hydroxide (TMAH) solution [25][26][27] and of the anti-reflection (AR) coating with an Al 2 O 3 film by the atomic layer deposition (ALD) [21,28].…”