Abstract:The electrical and optical properties of IGZO-based transparent conductive oxide (TCO), fabricated by reactivesputtering, are optimized using post microwave treatment (MWT), not rapid temperature annealing (RTA), for silicon solar cell. Compared to the sheet resistance and transmittance of IGZO-based TCO after RTA and MWT, we observed a transmittance of over 75 % in the visible and near ultraviolet range of 370-1,200 nm in common, while the lower sheet resistance of 15 Ω/□ was obtained, which was 3.5 times low… Show more
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