Improved Analytical Modeling of Membrane Large Deflection With Lateral Force for the Underwater CMUT Based on Von Kármán Equations

Wang, Jiujiang; Pun, Sio Hang; Mak, Peng Un; Cheng, Chor Hing; Yu, Yuanyu; Vai, Mang I

doi:10.1109/jsen.2016.2586969

Cited by 9 publications

(2 citation statements)

References 29 publications

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“…Therefore, in 2016, Wang et al proposed to advance the technique by introducing the perturbation method to solve the von Kármán equations so that a general solution can be reached. In the article, they demonstrated the technique and reached an analytical model for single layer collapse mode CMUT with large deflection membrane under a uniform pressure [ 67 ] with the fixed boundary condition at the rim of the membrane. The governing equations and boundary conditions were as Equations ( 24 ) to ( 26 ).…”

Section: Static Membrane Deflection Modelsmentioning

confidence: 99%

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Wang

Liu²,

et al. 2021

Micromachines

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Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

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Section: Static Membrane Deflection Modelsmentioning

confidence: 99%

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Wang

Liu²,

et al. 2021

Micromachines

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“…The small deflection approach is proposed when the membrane's displacement due to the sensing material's mass change is small in comparison to its thickness, and there is a linear relation between the applied force and the membrane's displacement [10]. Meanwhile, in the large membrane deflections, there is a nonlinearity seen between the membrane's displacement and the applied force [14]. The CMUT sensor is modeled using a mass-spring-damper in one dimension, as shown in Figure 2, where k and B are the membrane's spring constant and damping factor, respectively [10].…”

Section: Cmut Sensor Structure and Mechanism Of Operationmentioning

confidence: 99%

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Nazemi

Balasingam

Swaminathan

et al. 2020

Sensors

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Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

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Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency

Wang

Pun²,

et al. 2022

IEEE Access

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Improved Analytical Modeling of Membrane Large Deflection With Lateral Force for the Underwater CMUT Based on Von Kármán Equations

Cited by 9 publications

References 29 publications

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency

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