Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: I. Analysis of numerical techniques

Wang, Hongyu; Jiang, Wei; Wang, You‐Nian

doi:10.1088/0963-0252/19/4/045023

Cited by 96 publications

(94 citation statements)

References 63 publications

(95 reference statements)

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“…We make use of our implicit Particle‐in‐cell/Monte Carlo collision (PIC/MCC) method (1D3V) to investigate the MAE on a single‐frequency rf source excited and geometrically symmetric CCP. This method has been described in detail and widely tested before . The self‐bias voltage is determined in the simulation in an iterative way to ensure that the net current to the two electrodes per one rf cycle is zero.…”

Section: Pic/mcc Modelmentioning

confidence: 99%

Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma

Yang

Zhang

Wang

et al. 2017

Plasma Processes & Polymers

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Magnetical asymmetric effect (MAE) in a geometrically and electrically symmetric capacitively coupled plasma is investigated by a one‐dimensional implicit Particle‐in‐cell/Monte Carlo collision simulation. We applied four types of asymmetric magnetic field parallel to the electrodes and the discharge operates at a single‐frequency rf source of 13.56 MHz and 150 V in argon with the pressure of 30 mTorr. The simulation results show that the asymmetric magnetic field can generate a significant dc self‐bias, which is the result of a particle‐flux balance applied to each electrode. The asymmetric magnetic field with variable gradient can produce controllable asymmetry in the plasma density and ion flux profiles to each electrode, together with a significant change on IEDF shape and width on the powered electrode. It has demonstrated that the MAE is a promising approach to increase the ion flux and still make the ion energy be adjusted in a certain range, that is, independent control of ion flux and energy to the electrode. The results suggest that the MAE can be an effective means to control the plasma properties as an augmentation to conventional measures.

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Section: Pic/mcc Modelmentioning

confidence: 99%

Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma

Yang

Zhang

Wang

et al. 2017

Plasma Processes & Polymers

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“…An explicit PIC model is computationally intensive, since it requires to resolve the Debye length and the electron oscillation frequency, which requires much smaller space and time steps, leading to high computational cost. The alternative approach is to use an implicit PIC model, where much larger space and time steps are allowed with reasonable accuracy. Therefore, in this paper, we use a one‐dimensional implicit and electrostatic PIC/MCC method to investigate the operating effect of an external EB in a rf argon discharge.…”

Section: Physical and Numerical Modelmentioning

confidence: 99%

“…In the PIC code, the particle density

ρ_{g}

and temperature

T_{g}

(mean energy) are defined on the grids

g

and calculated by deposition of particle positions and velocities at grid points

g

, respectively, where a cell based weighting scheme is adopted,

\begin{array}{l} center & ρ_{g} = \frac{1}{V_{g}} \sum_{p} W true(X_{g} - X_{p} true), \\ center & T_{g} = \frac{1}{V_{g}} \sum_{p} \frac{1}{2} m_{s} v_{p}^{2} W true(X_{g} - X_{p} true) . \end{array}

…”

Section: Physical and Numerical Modelmentioning

confidence: 99%

“…Here,

V_{g}

is the volume of the cell,

\sum_{p}

denotes the summation over one species (electron or ion) particles,

m_{s}

is the mass of the species,

v_{p}

is the velocity of the particles, and

W true(X_{g} - X_{p} true)

is the interpolation function between grid points at

X_{g}

and particles at

X_{p}

. In order to investigate the electron kinetics, we plot the space‐time‐averaged electron energy probability function (EEPF), which is defined as

n_{e a v} \frac{N true(ε true)}{ϵ^{1 /2} \sum_{ϵ} ϵ N (ε)}

, where

n_{e a v}

is the space‐time‐averaged electron density,

N true(ε true)

is the super electron number with energy

ε

\sum_{ε}

denotes the summation over all energy ranges, and the unit of the EEPF is eV −32 m −3 similar with Refs.…”

Section: Physical and Numerical Modelmentioning

confidence: 99%

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Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

Zhang

Huang

et al. 2017

Plasma Processes & Polymers

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We investigate the effect of external electron beam injection on plasma kinetics of a radio‐frequency (rf) capacitive argon discharge at a pressure of 100 mTorr. The rf voltage is applied to the one electrode. Monoenergetic electron beam is injected from the other electrode, with a laboratory accessible injection current and energy. The electron beam injected electrode is grounded. A direct‐implicit particle‐in‐cell/Monte‐Carlo method is used to self‐consistently simulate the plasma density, electron temperature, plasma potential, electron energy probability function (EEPF), and the electron and ion fluxes. The presence of the electron beam increases the plasma density, while decreases the electron temperature and the plasma potential. The plasma density can increase by a factor of 5, at the same time the electron temperature can decrease from 3 to 0.5 eV. The reason is that, with the electron injection, there are more low‐energy electrons occupation in the EEPF. The EEPF is sensitive to the beam modulation: even a small beam current of 0.01A can modify the EEPF significantly. This may have crucial importance for plasma processing of polymers and graphene, where low energy treatment is desired. In addition, electron and ion fluxes to the ground electrode, are also significantly modified with increasing flux and decreasing bombardment energy.

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“…8,9 In last two decades, particle-in-cell Monte Carlo collision (PIC-MCC) model has been applied in the simulation of high pressure discharge increasingly with the improvement of computer performance. [10][11][12][13][14] However, because of the high charged particle density and neutral gas pressure, it was only used in several researches to investigate atmospheric pressure discharge. It was applied by Wang's group in the simulation of atmospheric pulse discharge in different working gases 15 and applied by Felipe Iza coupling with fluid model in the simulation of the multi pulses atmospheric plasma.…”

Section: Introductionmentioning

confidence: 99%

Studies on nanosecond pulsed atmospheric pressure discharge with particle-in-cell Monte Carlo collision simulation

Yang

Duan

et al. 2012

Physics of Plasmas

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Nanosecond pulsed atmospheric pressure discharge becomes an active research topic because of its promising prospect of applications in many areas. To understand its dynamics, the discharge process was studied by one-dimensional implicit particle-in-cell Monte Carlo collision (PIC-MCC) simulation coupled with a particle renormalization algorithm, in which multiple electron Monte Carlo collisions per step were considered to improve the computation efficiency. In the simulation, the effects of discharge conditions such as plateau voltage, pulse rise time, and initial charged particle density were investigated. It is found that the plateau voltage in the pulse waveform is a major factor controlling the final charged particle density in the plasma bulk, and the built-up time and steady thickness of cathode sheath are proportional to the pulse rise time, whereas reversely proportional to the initial charged particle density. V C 2012 American Institute of Physics.

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Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: I. Analysis of numerical techniques

Cited by 96 publications

References 63 publications

Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma

Magnetical asymmetric effect in geometrically and electrically symmetric capacitively coupled plasma

Electron energy probability function modulation with external electron beam in capacitive coupled radio frequency discharges

Studies on nanosecond pulsed atmospheric pressure discharge with particle-in-cell Monte Carlo collision simulation

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