Implementation of the ArF resists based on VEMA for sub-100-nm device

Kim, Hyun Woo; Lee, Sook; Choi, Sung-Jin; Lee, Sungho; Kang, Yoon-Ho; Woo, Sang Uk; Nam, Dongseok; Chae, Yun-Sook; Kim, Ji-Soo; Moon, Joo-Tae; Kavanagh, Robert J.; Barclay, George G.

doi:10.1117/12.474253

SPIE Proceedings

2002

DOI: 10.1117/12.474253

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Implementation of the ArF resists based on VEMA for sub-100-nm device

Hyun Woo Kim

Sook Lee

Sung-Jin Choi

et al.

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Implementation of the ArF resists based on VEMA for sub-100-nm device

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