IEEE Ultrasonics Symposium, 2005.
DOI: 10.1109/ultsym.2005.1603252
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Implementation of master curves for cMUT arrays design

Abstract: This paper reports on master curves for the design of micro-machined transducer in air and in water immersion. Three different membrane configurations circular, square and rectangular are studied. A simple distributed model has been implemented to simulate the static and dynamic cMUT response. Most important parameters, which attracted attention in cMUT electroacoustic response, are collapse voltage, resonant frequency in air; and center frequency and bandwitdh of the transducer arrays.

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Cited by 4 publications
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“…The CMUT can be used as either a sensor or an actuator. In recent years, significant progress has been made in modeling, design, and fabrication of CMUTs and CMUT arrays .…”
Section: Introductionmentioning
confidence: 99%
“…The CMUT can be used as either a sensor or an actuator. In recent years, significant progress has been made in modeling, design, and fabrication of CMUTs and CMUT arrays .…”
Section: Introductionmentioning
confidence: 99%
“…Τα τελευταία χρόνια σημειώθηκε αξιόλογη πρόοδος στη μοντελοποίηση, το σχεδιασμό και την παραγωγή CMUT [120], [121] και φασικών συστοιχιών από CMUT [122] 1. Προεπεξεργασία:…”
Section: αποτίμηση των χαρακτηριστικών του Cmutunclassified