Implementation of a tunable hybrid system with coupled high Q-factor resonators based on mode localization for sensing purposes

Abstract

In this paper, we present a fully tunable system able to generate mode localization between a 170 000 Q-factor quartz crystal microbalance at 1 MHz and a digital device (field programmable gate array) simulating in real time the presence of an identical and weakly-coupled second resonator. Indeed, this method allows to precisely select each parameter value and thus to reach the optimal configuration with the maximum sensitivity to perturbations. In addition, this design gives a perfect adaptability to the geometry of the piezoelectric resonator, that allows to work with much higher frequencies and Q-factors than conventional cantilevers or tuning-forks usually selected for the design of mode-localized sensors. The experimental sensitivities reached in this work are at least two orders of magnitude higher than the ones found in the literature, which is promising for the design of a new generation of ultrasensitive sensors based on Anderson localization.

A Comprehensive Categorization of Micro/Nanomechanical Resonators and Their Practical Applications from an Engineering Perspective: A Review

“…The practical implementation is still very problematic and needs further improvements in spite of the significant advantages for the mode-localized sensors, which resulted in conducting further studies to improve the performance of mode-localized devices and reduce their restrictions. [272,273,[411][412][413][414][415] For instance, Zhao et al [413] demonstrated an optimal operating region for improving the resolution of amplitude ratio measurements. Further, a minimum noise floor of ≈16 ppbHz −1/2 was obtained in terms of normalized stiffness perturbation by optimizing the coupling strength and initial stiffness mismatch.…”

Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation

“…For MEMS sensors, the authors often investigate the number of coupled resonators [7][8][9], and the use of other kind of resonators and coupling [10,11]. Recently, the coupling between resonators of different physical nature has been proposed [12,13].…”

Towards a Hybrid Mass Sensing System by Combining a QCM Mass Sensor With a 3-DOF Mode Localized Coupled Resonator Stiffness Sensor

“…To push the performance boundary of micro-resonators further, an alternative sensing mechanism based on coupled resonators with multi-degree of freedom has recently emerged. It has been demonstrated that it can achieve several orders of magnitude enhancements in sensitivity [16][17][18]. As a notable example, the 3-DOF mode localized coupled resonator stiffness sensor attained a 56-fold sensitivity improvement compared to a 2-DOF device, and achieved a 3-orders sensitivity enhancement compared to the 1-DOF resonator sensor.…”