Implantation site design for large area diamond quantum device fabrication
Milan Vićentijević,
Milko Jakšić,
Tomislav Suligoj
Abstract:With the number of qubits increasing with each new quantum processor design, it is to be expected that the area of the future quantum devices will become larger. As diamond is one of the promising materials for solid state quantum devices fabricated by ion implantation, we developed a single board diamond detector/preamplifier implantation system to serve as a testbed for implantation sites of different areas and geometry. We determined that for simple circular openings in a detector electrode, the uniformity … Show more
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