“…Proper encapsulation is essential to guarantee that implantable MEMS pressure sensors function in vivo with robustness, reliability, biocompatibility, and minimal performance decline . Encapsulation of MEMS sensors within a thin coating or cladding is a commonly used protection method. ,− This involves the application of an ultrathin nonmetallic or metallic coating, including ceramic materials, alloys, and polymers (e.g., parylene, polyimide, and polydimethylsiloxane). For example, in 2018, Tai’s group proposed an encapsulation method based on a combination of parylene and silicon oil coating. ,, They immersed the encapsulated pressure sensor with a zero-drift error of ∼2 mmHg in saline solution at 77 °C for 106 days, while the encapsulation is ∼0.8 mm thick, not negligible compared to the sensor size of ∼2.5 × 2.5 × 0.8 mm 3 .…”