Abstract:In this work, the impacts of wafer doping type on structural and optical properties of black silicon (b-Si) fabricated by metal-assisted chemical etching (MACE) process are investigated. P-type and n-type mono-crystalline silicon (mono c-Si) wafers are etched in an aqueous solution of hydrofluoric acid (HF), silver nitrate (AgNO3) and deionised water (DI H2O) at room temperature and various durations from 5-20 minutes. Surface morphological results demonstrate the formation of b-Si nanowires (NWs) with average… Show more
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