2023
DOI: 10.3390/mi14010170
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Impacts of Small-Scale Effect and Nonlinear Damping on the Nonlinear Vibrations of Electrostatic Microresonators

Abstract: Although the small-scale effect and nonlinear damping on the nonlinear vibration of microbeam electrostatic resonators are important, they have been overlooked by researchers. We use the slender beam model including the small-scale effect and nonlinear damping to investigate the nonlinear vibrations of the electrostatic resonators in the present paper. We apply the Galerkin method on a nonlinear partial differential equation to obtain the nonlinear ordinary differential equations for the first and third modes.… Show more

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Cited by 3 publications
(2 citation statements)
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“…As mentioned above, the nonlinear damping and stiffness together with impact-induced nonlinearity would determine the overall dynamical behavior of the vibro-impact systems. The resultant effects of combined intrinsic and impact-induced nonlinearities will be introduced in section 2.4 and the detailed modeling for them can be found in [60][61][62][63][64][65][66].…”
Section: Model and Behavior Representationsmentioning
confidence: 99%
“…As mentioned above, the nonlinear damping and stiffness together with impact-induced nonlinearity would determine the overall dynamical behavior of the vibro-impact systems. The resultant effects of combined intrinsic and impact-induced nonlinearities will be introduced in section 2.4 and the detailed modeling for them can be found in [60][61][62][63][64][65][66].…”
Section: Model and Behavior Representationsmentioning
confidence: 99%
“…Many microelectronic devices and sensor networks, such as implanted medical machines and embedded sensors, are inconvenient to replace their batteries, so energy supply technology is needed to provide them with a reliable and continuous energy supply to overcome the limitations. The commonly used approaches for harvesting ambient vibration energy include triboelectric, electromagnetic, electrostatic [ 3 ], and piezoelectric energy harvesting. The merits of simple structure, large power density, and simple operation mechanisms make piezoelectric energy harvesters (PEHs) widely employed in the ocean [ 4 ], pavement [ 5 , 6 , 7 ], and vibration energy harvesting [ 8 , 9 , 10 ].…”
Section: Introductionmentioning
confidence: 99%