2019
DOI: 10.1016/j.apsusc.2019.03.007
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Impact of the wall roughness on the quality of micrometric nozzles manufactured from fused silica by different laser processing techniques

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Cited by 6 publications
(5 citation statements)
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“…This technique allowed the precise 2.5D processing with high material removal rate reaching 0.07 mm 3 /s for the inner converging-diverging channel with only a 1.7 W average laser power. The average peak-to-valley distance of the milled surface does not exceed 10 µm using this technique [30].…”
Section: Gas Nozzles For Lpa Experimentsmentioning
confidence: 83%
“…This technique allowed the precise 2.5D processing with high material removal rate reaching 0.07 mm 3 /s for the inner converging-diverging channel with only a 1.7 W average laser power. The average peak-to-valley distance of the milled surface does not exceed 10 µm using this technique [30].…”
Section: Gas Nozzles For Lpa Experimentsmentioning
confidence: 83%
“…This step was required due to the incapability of the rear-side machining technique to fabricate high negative taper angles, which are unavoidable in the configuration of converging-diverging Laval nozzles. Additionally, the output surface of nozzles with small channels was mechanically polished to reduce the gas concentration drop due to the chamfered edges 30 . For the formation of structures smaller than 200 μm, the femtosecond laser-induced selective chemical etching FLICE technique was implemented.…”
Section: Methodsmentioning
confidence: 99%
“…At the modest pressure of 20–60 bar fused silica nozzles ensure significantly longer operation times than metallic or polymeric nozzles. Laser-assisted hybrid microfabrication technique 29 , 30 of fused silica allows the formation of centimetre-size frame and channels of the diameter less than 40 μm with the surface roughness < 1 μm from a single block. The formation quality exceeds the precision of 3D printing 31 and electro-erosion technique 32 .…”
Section: Introductionmentioning
confidence: 99%
“…Although additive manufacturing processes like stereolithography and selective laser sintering are also limited to throat diameters down to 1 mm, complex channels are manufactured in a single step (Döpp et al 2016;Andrianaki et al 2023). Femtosecond laser-induced chemical etching (FLICE), laser trepanning and electrical discharge machining (EDM) can be used to produce diameters smaller than 100 µm (Takahashi et al 2013;Tomkus et al 2019;Chiomento et al 2021;Zuffi et al 2022). However, de Laval-shaped channel formation is typically a two-step process for laser trepanning and EDM techniques (Li et al 2018;Chiomento et al 2021;Zuffi et al 2022).…”
Section: Introductionmentioning
confidence: 99%
“…The FLICE technique is more flexible as converging-diverging channels can be formed from one side, and additional alignment and coupling steps can be avoided (Rovige et al 2021). However, FLICE, laser trepanning or EDM of micrometre-scale diameters are limited to low millimetre-scale depths (Takahashi et al 2013;Tomkus et al 2019;Chiomento et al 2021). For larger nozzles, nanosecond rear-side milling is an appealing approach, as centimetre-sized nozzles can be formed with channel diameters down to 100 µm (Tomkus et al 2018;Chaulagain et al 2021).…”
Section: Introductionmentioning
confidence: 99%