Abstract:The trend of the photovoltaic industry consisting in decreasing the wafer thickness leads to the strengthening of the requirements related to surface passivation. AlOx is known to be a promising candidate to fulfill these requirements by combining chemical and field effect passivation. However, Al 2 O 3 is not implemented in production yet since its integration still faces some issues (aging, thermal stability blisters…). This work focuses on the impact of the surface preparation prior to the AlOx deposition..… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.