Impact of Pulse Duration on the Properties of Laser Hyperdoped Black Silicon
Patrick Mc Kearney,
Sören Schäfer,
Xiaolong Liu
et al.
Abstract:The impact of three different pulse durations (100 fs, 1, and 10 ps) on the formation of laser hyperdoped black silicon with respect to surface morphology, sub‐bandgap absorptance, the sulfur concentration profile, and the effective minority carrier lifetime after Al2O3 surface passivation is investigated. The current flow behavior is compared through the hyperdoped layer by I–V measurements after hyperdoping with different pulse durations. For conditions that give the same absolute sub‐bandgap absorptance, an… Show more
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