RSM 2013 IEEE Regional Symposium on Micro and Nanoelectronics 2013
DOI: 10.1109/rsm.2013.6706516
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Impact of processing parameters on low-voltage power MOSFET threshold voltage considering defect generation

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Cited by 2 publications
(3 citation statements)
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“…2. VTH recovery for different recovery biases [3]. With VG_R = -2.25V a negligible recovery is shown; moving the gate bias down to -0.25 V a higher recovery occurs.…”
Section: Device Structure and Measurement Techniquementioning
confidence: 93%
See 1 more Smart Citation
“…2. VTH recovery for different recovery biases [3]. With VG_R = -2.25V a negligible recovery is shown; moving the gate bias down to -0.25 V a higher recovery occurs.…”
Section: Device Structure and Measurement Techniquementioning
confidence: 93%
“…Different studies have been performed on power VDMOSFETs in order to understand [2] and overcome [3] NBTI induced degradation. Recently we reported that, in power U-MOSFETs, oxide defects are the main source for the charge trapping and de-trapping occurring when NBTI stress is applied to the device [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…There is a possibility that the defects created due to the generation of electron-hole pair might trap more electrons when a gate voltage is applied. This phenomenon increases the threshold voltage [13]. Fig.…”
Section: B Current Degradationmentioning
confidence: 93%