Abstract:Abstract. The stability of tool influnce function (TIF) is the key to achieve deterministic removal in the computer controlled optical surfacing (CCOS). In this paper, the comparative experiment was conducted to investigate the impact of two common pad materials (i.e., cloth, pitch) on the TIF. In addition, by assistant of the dynamometer, the polishing force of the TIF was detected to reveal the reason of the instability of TIFs. The results show that: 1) the stability of cloth tool is better than that of pit… Show more
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