Impact of morphology on high-speed humidity sensor performance

Steele, J.J.; Gospodyn, James; Sit, Jeremy C.; Brett, M. J.

doi:10.1109/jsen.2005.859359

Cited by 47 publications

(32 citation statements)

References 9 publications

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“…1 This has opened the new realm of tailoring desired physical properties along specific directions in space. Nanostructured materials have been already employed for several interesting sensor applications 2,3 and functional optical coatings, 4,5 for example. However, intrinsic physical properties are not fully understood yet.…”

Section: Introductionmentioning

confidence: 99%

Optical, structural, and magnetic properties of cobalt nanostructure thin films

Schmidt

Kjerstad

Hofmann

et al. 2009

Journal of Applied Physics

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We report on optical, structural, and magnetic properties of two substantially different cobalt nanostructure thin films deposited at an oblique angle of incidence of 85°away from the substrate normal. Comparison is made between an achiral columnar thin film grown without substrate rotation and a chiral nanocoil sculptured thin film by glancing angle deposition with substrate rotation. Generalized spectroscopic ellipsometry is employed to determine geometrical structure properties and the anisotropic optical constants of the films in the spectral range from 400 to 1000 nm. The magnetic properties are analyzed with a superconducting quantum interference device magnetometer. Both nanostructure thin films show highly anisotropic optical properties such as strong form birefringence and large dichroism. In particular, Co slanted columnar thin films are found to possess monoclinic optical properties. Magnetic measurements at room temperature show hysteresis anisotropy with respect to a magnetic field either parallel or perpendicular to the nanostructures' long axis. We find extremely large coercive fields of approximately 3 kOe for our achiral columnar nanostructures.

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Section: Introductionmentioning

confidence: 99%

Optical, structural, and magnetic properties of cobalt nanostructure thin films

Schmidt

Kjerstad

Hofmann

et al. 2009

Journal of Applied Physics

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“…By exploiting various rotation schemes for the substrate, a wide variety of thin-film morphologies including slanted columns, helices, S-shapes, C-shapes and zigzag/chevron structures can be fabricated [5][6][7][8]. Because of controlled porosity and microstructure, GLAD films have a wide range of suggested applications, such as three-dimensional photonic crystals [9][10][11], birefrigent omnidirectional reflectors [12], graded index optical filters [13,14], broadband antireflection coatings [15,16], linear polarizers [17], and fluid concentration sensors [18,19].…”

Section: Introductionmentioning

confidence: 99%

Optical and Structural Properties of Bilayer Circular Filter Prepared by Glancing Angle Deposition

Park

Sobahan

Kim

et al. 2009

Journal of the Optical Society of Korea

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In this paper, we report the optical and structural properties of a bilayer circular filter fabricated by a glancing angle deposition technique. The bilayer circular filter is realized by a two-layer TiO2 helical film with layers of opposite structural handedness. It is found that the bilayer circular filter reflects both right and left circularly polarized light with wavelength lying in the Bragg regime. The microstructure of the bilayer circular filter is also investigated using a scanning electron microscope.

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“…Metal oxide thin films are also used in creating these capacitive humidity sensors. The metal oxide thin films are made to be porous using various techniques such as glancing angle deposition wherein the substrate is rotated while the film is being deposited [1]. These films sense the changes in humidity through its pores, which are filled with water molecules, and thus its dielectric constant and capacitance changes.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a capacitive relative humidity sensor using aluminum thin films deposited on etched printed circuit board

Lee

Culaba

2016

MATEC Web of Conferences

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Abstract.A capacitive humidity-sensing device was created by thermal evaporation of 99.999% aluminum. The substrate used for the coating was etched double-sided printed circuit board. The etched printed circuit board serves as the dielectric of the capacitor while the aluminum thin films deposited on either side serve as the plates of the capacitor. The capacitance was measured before and after exposure to humidity. The device was then calibrated by comparing the readings of capacitance with that of the relative humidity sensor of the Vernier LabQuest2. It was found that there is a linear relationship between the capacitance and relative humidity given by the equation C=1.418RH+29.139 where C is the capacitance and RH is the relative humidity. The surface of the aluminum films is porous and it is through these pores that water is adsorbed and capillary condensation occurs, thereby causing the capacitance to change upon exposure to humidity.

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Impact of morphology on high-speed humidity sensor performance

Cited by 47 publications

References 9 publications

Optical, structural, and magnetic properties of cobalt nanostructure thin films

Optical, structural, and magnetic properties of cobalt nanostructure thin films

Optical and Structural Properties of Bilayer Circular Filter Prepared by Glancing Angle Deposition

Fabrication of a capacitive relative humidity sensor using aluminum thin films deposited on etched printed circuit board

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