Impact of mode localization on the motional resistance of coupled MEMS resonators

Erbes, Andreja; Thiruvenkatanathan, Pradyumna; Seshia, Ashwin A.

doi:10.1109/fcs.2012.6243592

Cited by 11 publications

(10 citation statements)

References 11 publications

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“…While this effect can be beneficial for improving the parametric sensitivity and environmental immunity in a sensing context, the confinement of the vibration energy can be detrimental for achieving low R x values using long chains of weakly coupled micro-mechanical resonators [4]. One possible approach to improving the immunity to structural W2A.003…”

Section: Theory Vibration Confinement In Coupled Resonatorsmentioning

confidence: 99%

“…This effect often results in non-uniform reductions in R x from the case of perfect symmetry [4]. While it is possible to tune the structural symmetry and consequently improve conformity in R x reduction [3]- [4], this method still remains impractical for larger 1D-κ arrays.…”

Section: Introductionmentioning

confidence: 99%

“…While it is possible to tune the structural symmetry and consequently improve conformity in R x reduction [3]- [4], this method still remains impractical for larger 1D-κ arrays. Having a post manufacturing trimming process would require each of the subsequent resonators to have its own tuning electrode in order to achieve perfect structural symmetry.…”

Section: Introductionmentioning

confidence: 99%

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Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

Erbes

Thiruvenkatanathan

Yan

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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This paper investigates the vibration dynamics of a closed-chain, cross-coupled architecture of MEMS resonators. The system presented here is electrostatically transduced and operates at 1.04 MHz. Curve veering of the eigenvalue loci is used to experimentally quantify the coupling spring constants. Numerical simulations of the motional resistance variation against induced perturbation are used to assess the robustness of the cross-coupled system as opposed to equivalent traditional open-ended linear one-dimensional coupling scheme. Results show improvements of as much as 32% in the motional resistance between the cross-coupled system and its onedimensional counterpart.

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Section: Theory Vibration Confinement In Coupled Resonatorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

Erbes

Thiruvenkatanathan

Yan

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

View full text Add to dashboard Cite

show abstract

“…It is known that coupled resonator modes are insensitive to minor variations in the individual resonator characteristics [12] and if they aren't, the so called mode localization occurs that favors localization of the vibration energy on a site with a large mismatch. In the latter case, the gyro operation is quite interesting and it depends on the delocalization of the localized mode under rotation.…”

Section: Introductionmentioning

confidence: 99%

Magnetically coupled resonators for rate integrating gyroscopes

Pai

Pourzand

Tabib-Azar

2014

IEEE SENSORS 2014 Proceedings

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This work demonstrates for the first time the use of magnetic field to couple mechanical resonators that can be separated by long distances (8mm in this work) compared to coulombic/electrostatic coupling (~ 1 nm -1 μm depending on the surface charge density or E-field). The resonators were composed of electroplated copper cantilevers with proof-mass resulting in 1 kHz resonant frequency when uncoupled. The coupling magnetic field was produced by 1 mT rare earth magnets mounted on the resonators. Electrostatic actuation and sensing was used to excite and sense the collective motion of the coupled resonators. The radial motion of the resonators in the presence of an in-plane rotation gives rise to the Coriolis force. Thus, the rotation changes the rate of energy exchange between the coupled resonators enabling rate integrating gyros.

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“…In engineering, scientific, and mathematical contexts, examples of coupled resonator and oscillator arrays are diverse and abundant [1][2][3][4][5][6][7]. However, when the technical scope is limited to mechanical systems or structures, research typically focuses on arrays of resonators in which the coupling between subunits is conservative and nearest-neighbor in nature [8][9][10][11][12][13][14]. When these subunits are nominally identical and the coupling is weak, conventional modal and/or perturbation analyses can be applied and localization [8,9] or the spatial confinement of energy in distinct or limited regions can be observed.…”

Section: Introductionmentioning

confidence: 99%

Dynamics of Globally and Dissipatively Coupled Resonators

Sabater

Rhoads

2015

Journal of Vibration and Acoustics

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This work explores the dynamics of arrays of globally and dissipatively coupled resonators. These resonator arrays are shown to be capable of exhibiting seemingly new collective behaviors which are highly sensitive to the dispersion of the natural frequencies of the constituent resonators in the array, the intrinsic damping of the resonators in the array, and the magnitude of the global coupling coefficient that captures the strength of the dissipative coupling. These behaviors have been identified within the work as group attenuation, confined attenuation, and group resonance. Group and confined attenuation are associated with an absence of energy and are strongly dependent on the dispersion of the natural frequencies. In cases of moderate dissipative coupling, the effects of group and confined attenuation could be interpreted as frequency-dependent damping. In cases where the global coupling coefficient is large, group resonance is significant. This effect is synonymous with the resonances of the constituent resonators being shared and occurring at frequencies in between the isolated resonators' natural frequencies. Accordingly, one could view group resonance as the antithesis of localization, in that the localization of the modes of a conservatively coupled system with a finite dispersion of the constituent resonators' natural frequencies is most significant when the coupling is weak. The authors believe that collective behaviors, such as those described herein, have direct applicability in new single-input, single-output resonant mass sensors, and, with extension, a variety of other sensing and signal processing systems.

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Impact of mode localization on the motional resistance of coupled MEMS resonators

Cited by 11 publications

References 11 publications

Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

Investigating vibration dyanmics of cross-coupled MEMS resonators for reduced motional resistance

Magnetically coupled resonators for rate integrating gyroscopes

Dynamics of Globally and Dissipatively Coupled Resonators

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