Impact of MegaSonic process conditions on PRE and sub-resolution assist feature damage

Enhancing acoustic cavitation using artificial crevice bubbles

“…Hence in the situations where lower acoustic amplitudes are required, e.g. to prevent heating or surface damage [14], it might not even be possible to generate or sustain a sufficiently active bubble population.…”

Effect of cleaning chemistry on MegaSonic damage

“…SC1 and Chemistry A show similar level of acoustic energy transfer ( figure 9). It has been well known that a photomask cleaning process using H 2 -DI, if used at proper gas concentration, shows lesser pattern damage than the equivalent cleaning process with SC1 [11,12]; therefore figure 10 only shows the comparison of pattern damage performance between H 2 -DI based and Chemistry A based mask cleaning processes. SC1 data was not collected intentionally.…”

Megasonic Cleaning of Blanket and Patterned Samples in Carbonated Ammonia Solutions for Enhanced Particle Removal and Reduced Feature Damage

“…With 1% of noble gases mixed in N 2 , highest intensity of SL signal was measured [20]. Some SL data have been reported in H 2 containing deionized water (DIW) subjected to MHz acoustic frequency; higher the H 2 concentration, the lower was the SL signal [16]. 0894-6507/$31.00 c 2013 IEEE Kumari et al made SL measurements in DI water saturated with different dissolved gases at an acoustic frequency of 0.93 MHz in the megasonic power density range of 0.1 to 4 W/cm 2 at 10 and 100% duty cycles [21].…”

“…It has been reported in literature that dissolved gases play an important role in controlling the intensity of transient cavitation in liquids [16], [17]. Young et al measured the SL signal from water saturated with different gases in a 20 kHz sound field at a power density of 10 W/cm 2 [18].…”