International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International Confe 2020
DOI: 10.29003/m1613.silicon-2020/242-247
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Impact of Mechanical Stress on Phase Formation in Hafnia

Abstract: The results of ab-initio calculations of Helmholtz free energy of tetragonal hafnia, stressed by tensile and compressive stresses of 1 GPa in different crystallographic planes at temperatures up to 2000 K, are presented.

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